JPS5749384Y2 - - Google Patents
Info
- Publication number
- JPS5749384Y2 JPS5749384Y2 JP15397277U JP15397277U JPS5749384Y2 JP S5749384 Y2 JPS5749384 Y2 JP S5749384Y2 JP 15397277 U JP15397277 U JP 15397277U JP 15397277 U JP15397277 U JP 15397277U JP S5749384 Y2 JPS5749384 Y2 JP S5749384Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15397277U JPS5749384Y2 (en:Method) | 1977-11-15 | 1977-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15397277U JPS5749384Y2 (en:Method) | 1977-11-15 | 1977-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5479034U JPS5479034U (en:Method) | 1979-06-05 |
| JPS5749384Y2 true JPS5749384Y2 (en:Method) | 1982-10-29 |
Family
ID=29141655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15397277U Expired JPS5749384Y2 (en:Method) | 1977-11-15 | 1977-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5749384Y2 (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57194522A (en) * | 1981-05-27 | 1982-11-30 | Oki Electric Ind Co Ltd | Thermal treatment of semiconductor wafer |
| JP2598637B2 (ja) * | 1987-02-26 | 1997-04-09 | 東京エレクトロン株式会社 | 酸化・拡散装置 |
| JP2678184B2 (ja) * | 1988-02-10 | 1997-11-17 | 東京エレクトロン株式会社 | 酸化炉 |
-
1977
- 1977-11-15 JP JP15397277U patent/JPS5749384Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5479034U (en:Method) | 1979-06-05 |