JPS5747866A - Surface treatment by electric glow discharge - Google Patents

Surface treatment by electric glow discharge

Info

Publication number
JPS5747866A
JPS5747866A JP12106580A JP12106580A JPS5747866A JP S5747866 A JPS5747866 A JP S5747866A JP 12106580 A JP12106580 A JP 12106580A JP 12106580 A JP12106580 A JP 12106580A JP S5747866 A JPS5747866 A JP S5747866A
Authority
JP
Japan
Prior art keywords
treating
materials
electric
treating elements
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12106580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154869B2 (enrdf_load_stackoverflow
Inventor
Naotatsu Asahi
Shizuka Yamaguchi
Kazuyoshi Terakado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12106580A priority Critical patent/JPS5747866A/ja
Publication of JPS5747866A publication Critical patent/JPS5747866A/ja
Publication of JPS6154869B2 publication Critical patent/JPS6154869B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Physical Vapour Deposition (AREA)
JP12106580A 1980-09-03 1980-09-03 Surface treatment by electric glow discharge Granted JPS5747866A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12106580A JPS5747866A (en) 1980-09-03 1980-09-03 Surface treatment by electric glow discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12106580A JPS5747866A (en) 1980-09-03 1980-09-03 Surface treatment by electric glow discharge

Publications (2)

Publication Number Publication Date
JPS5747866A true JPS5747866A (en) 1982-03-18
JPS6154869B2 JPS6154869B2 (enrdf_load_stackoverflow) 1986-11-25

Family

ID=14801966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12106580A Granted JPS5747866A (en) 1980-09-03 1980-09-03 Surface treatment by electric glow discharge

Country Status (1)

Country Link
JP (1) JPS5747866A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015183293A (ja) * 2014-03-22 2015-10-22 ジェイ アンド エル テク カンパニー リミテッド ホロウカソード放電を用いた内径窒化システム

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62183870U (enrdf_load_stackoverflow) * 1986-05-13 1987-11-21
JPS62186765U (enrdf_load_stackoverflow) * 1986-05-16 1987-11-27
JPS63106467U (enrdf_load_stackoverflow) * 1986-12-26 1988-07-09
JPH02140180A (ja) * 1988-11-21 1990-05-29 Satoshi Takigawa ゴルフ用テイ
JPH025981A (ja) * 1988-06-27 1990-01-10 Satoshi Takigawa ゴルフ用テイ
JPH0332769A (ja) * 1989-06-29 1991-02-13 Katsuji Takeno ゴルフ用ティ製造用紫外線照射装置
JPH0497764A (ja) * 1990-08-15 1992-03-30 Tosu Planning:Kk ゴルフティー
JPH0576471U (ja) * 1992-03-27 1993-10-19 昭喜 佐藤 ゴルフ用ティー

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55104474A (en) * 1979-02-02 1980-08-09 Hitachi Ltd Surface-treating method for metallic material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55104474A (en) * 1979-02-02 1980-08-09 Hitachi Ltd Surface-treating method for metallic material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015183293A (ja) * 2014-03-22 2015-10-22 ジェイ アンド エル テク カンパニー リミテッド ホロウカソード放電を用いた内径窒化システム

Also Published As

Publication number Publication date
JPS6154869B2 (enrdf_load_stackoverflow) 1986-11-25

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