JPS5747332A - Method of forming thin polymer film on base material - Google Patents

Method of forming thin polymer film on base material

Info

Publication number
JPS5747332A
JPS5747332A JP12204480A JP12204480A JPS5747332A JP S5747332 A JPS5747332 A JP S5747332A JP 12204480 A JP12204480 A JP 12204480A JP 12204480 A JP12204480 A JP 12204480A JP S5747332 A JPS5747332 A JP S5747332A
Authority
JP
Japan
Prior art keywords
discharge
monomer gas
monomer
effected
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12204480A
Other languages
Japanese (ja)
Other versions
JPS6039294B2 (en
Inventor
Minoru Ezoe
Takashi Ichinose
Masao Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Electric Industrial Co Ltd filed Critical Nitto Electric Industrial Co Ltd
Priority to JP12204480A priority Critical patent/JPS6039294B2/en
Publication of JPS5747332A publication Critical patent/JPS5747332A/en
Publication of JPS6039294B2 publication Critical patent/JPS6039294B2/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/125—In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction
    • B01D69/127—In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction using electrical discharge or plasma-polymerisation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

PURPOSE:The vessel is kept under reduced pressure as a monomer gas is being introduced and discharge is conducted between the lattice anode and the cathode to effect plasma polymerization to produce a high-polymer thin film used as a high- quality composite semipermeable film in high efficiency. CONSTITUTION:As a monomer gas is being introduced from the porous pipe 8 for supplying the monomer gas into the chamber 1a, evacuation is effected through pipes 12a and 12b with a vacuum pump to keep the pressure inside the chamber 1a to a level of 0.1-10 Torr and discharge is effected between the lattice anode 2 and the cathode 3. During the discharge, a part of the electrons formed by the discharge passes through the lattice anode 2 and reaches on the surface of the film f running on the rolle 7. The monomer introduced from the porous pipe 8 is activated by the collision with the electrons to cause plasma polymerization to form a high-polymer thin film of less thickness distribution.
JP12204480A 1980-09-02 1980-09-02 Method for producing thin polymer films on substrates Expired JPS6039294B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12204480A JPS6039294B2 (en) 1980-09-02 1980-09-02 Method for producing thin polymer films on substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12204480A JPS6039294B2 (en) 1980-09-02 1980-09-02 Method for producing thin polymer films on substrates

Publications (2)

Publication Number Publication Date
JPS5747332A true JPS5747332A (en) 1982-03-18
JPS6039294B2 JPS6039294B2 (en) 1985-09-05

Family

ID=14826211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12204480A Expired JPS6039294B2 (en) 1980-09-02 1980-09-02 Method for producing thin polymer films on substrates

Country Status (1)

Country Link
JP (1) JPS6039294B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57205403A (en) * 1981-06-12 1982-12-16 Hitachi Ltd Formation of polymer film
EP0175112A2 (en) * 1984-08-21 1986-03-26 Czeija, Karl, Dipl.-Ing. Dr.jur. Apparatus and process for producing semipermeable asymmetric composite films or membranes use in reverse osmosis plants
JPS63116848A (en) * 1986-11-05 1988-05-21 尾池工業株式会社 Non-hot stick film or sheet

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57205403A (en) * 1981-06-12 1982-12-16 Hitachi Ltd Formation of polymer film
JPH0257562B2 (en) * 1981-06-12 1990-12-05 Hitachi Ltd
EP0175112A2 (en) * 1984-08-21 1986-03-26 Czeija, Karl, Dipl.-Ing. Dr.jur. Apparatus and process for producing semipermeable asymmetric composite films or membranes use in reverse osmosis plants
JPS63116848A (en) * 1986-11-05 1988-05-21 尾池工業株式会社 Non-hot stick film or sheet

Also Published As

Publication number Publication date
JPS6039294B2 (en) 1985-09-05

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