JPS574707B2 - - Google Patents
Info
- Publication number
- JPS574707B2 JPS574707B2 JP7379732A JP7973273A JPS574707B2 JP S574707 B2 JPS574707 B2 JP S574707B2 JP 7379732 A JP7379732 A JP 7379732A JP 7973273 A JP7973273 A JP 7973273A JP S574707 B2 JPS574707 B2 JP S574707B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3307372A GB1440921A (en) | 1972-07-14 | 1972-07-14 | Evaporation of metals |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4953139A JPS4953139A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-05-23 |
| JPS574707B2 true JPS574707B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-01-27 |
Family
ID=10348193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7379732A Expired JPS574707B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-07-14 | 1973-07-14 |
Country Status (6)
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4076866A (en) * | 1975-03-30 | 1978-02-28 | Massachusetts Institute Of Technology | Method of growing films by flash vaporization |
| GB8430509D0 (en) * | 1984-12-04 | 1985-01-09 | Secr Defence | Alloy production |
| DE4139792A1 (de) * | 1991-12-03 | 1993-06-09 | Leybold Ag, 6450 Hanau, De | Verdampferschiffchen fuer eine vorrichtung zur beschichtung von substraten |
| US20090217876A1 (en) * | 2008-02-28 | 2009-09-03 | Ceramic Technologies, Inc. | Coating System For A Ceramic Evaporator Boat |
| JP5857176B2 (ja) * | 2009-05-13 | 2016-02-10 | パナソニックＩｐマネジメント株式会社 | 蒸着装置およびそれを用いた蒸着方法 |
| US20130129938A1 (en) * | 2010-01-06 | 2013-05-23 | Direct Vapor Technologies International | Method for the co-evaporation and deposition of materials with differing vapor pressures |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1552555A (en) * | 1923-01-20 | 1925-09-08 | Frederick Charles Hoar | Glass-refining furnace |
| US2127087A (en) * | 1935-11-04 | 1938-08-16 | Hartford Empire Co | Weir for glass making tank |
| US2665226A (en) * | 1950-04-27 | 1954-01-05 | Nat Res Corp | Method and apparatus for vapor coating |
| US2664852A (en) * | 1950-04-27 | 1954-01-05 | Nat Res Corp | Vapor coating apparatus |
| US2665227A (en) * | 1950-06-30 | 1954-01-05 | Nat Res Corp | Apparatus and method of coating by vapor deposition |
| US3329524A (en) * | 1963-06-12 | 1967-07-04 | Temescal Metallurgical Corp | Centrifugal-type vapor source |
| US3364296A (en) * | 1963-06-12 | 1968-01-16 | Air Reduction | Electron beam furnace |
| GB1103211A (en) * | 1965-01-08 | 1968-02-14 | Mullard Ltd | Improvements in and relating to vapour deposition and evaporation sources |
| US3467058A (en) * | 1965-12-03 | 1969-09-16 | United States Steel Corp | Apparatus for vaporizing metal |
| US3640762A (en) * | 1970-05-26 | 1972-02-08 | Republic Steel Corp | Method for vaporizing molten metal |
| JPS516410B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1971-09-30 | 1976-02-27 |
-
1972
- 1972-07-14 GB GB3307372A patent/GB1440921A/en not_active Expired
-
1973
- 1973-07-11 DE DE2335301A patent/DE2335301C2/de not_active Expired
- 1973-07-11 US US05/378,129 patent/US3930463A/en not_active Expired - Lifetime
- 1973-07-13 FR FR7325867A patent/FR2197072B1/fr not_active Expired
- 1973-07-13 CA CA176,450A patent/CA1003646A/en not_active Expired
- 1973-07-14 JP JP7379732A patent/JPS574707B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA1003646A (en) | 1977-01-18 |
| FR2197072A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-03-22 |
| US3930463A (en) | 1976-01-06 |
| GB1440921A (en) | 1976-06-30 |
| DE2335301C2 (de) | 1982-12-23 |
| JPS4953139A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-05-23 |
| DE2335301A1 (de) | 1974-01-31 |
| FR2197072B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-02-18 |