JPS5746214B2 - - Google Patents

Info

Publication number
JPS5746214B2
JPS5746214B2 JP49020487A JP2048774A JPS5746214B2 JP S5746214 B2 JPS5746214 B2 JP S5746214B2 JP 49020487 A JP49020487 A JP 49020487A JP 2048774 A JP2048774 A JP 2048774A JP S5746214 B2 JPS5746214 B2 JP S5746214B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49020487A
Other languages
Japanese (ja)
Other versions
JPS50115827A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49020487A priority Critical patent/JPS5746214B2/ja
Publication of JPS50115827A publication Critical patent/JPS50115827A/ja
Publication of JPS5746214B2 publication Critical patent/JPS5746214B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP49020487A 1974-02-22 1974-02-22 Expired JPS5746214B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49020487A JPS5746214B2 (enrdf_load_stackoverflow) 1974-02-22 1974-02-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49020487A JPS5746214B2 (enrdf_load_stackoverflow) 1974-02-22 1974-02-22

Publications (2)

Publication Number Publication Date
JPS50115827A JPS50115827A (enrdf_load_stackoverflow) 1975-09-10
JPS5746214B2 true JPS5746214B2 (enrdf_load_stackoverflow) 1982-10-01

Family

ID=12028486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49020487A Expired JPS5746214B2 (enrdf_load_stackoverflow) 1974-02-22 1974-02-22

Country Status (1)

Country Link
JP (1) JPS5746214B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542072A (en) * 1977-06-07 1979-01-09 Oki Electric Ind Co Ltd Manufacture for semiconductor device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498182A (enrdf_load_stackoverflow) * 1972-05-10 1974-01-24

Also Published As

Publication number Publication date
JPS50115827A (enrdf_load_stackoverflow) 1975-09-10

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