JPS5745921A - Forming method for semiconductor single crystal layer formed with laser irradiation - Google Patents
Forming method for semiconductor single crystal layer formed with laser irradiationInfo
- Publication number
- JPS5745921A JPS5745921A JP12156780A JP12156780A JPS5745921A JP S5745921 A JPS5745921 A JP S5745921A JP 12156780 A JP12156780 A JP 12156780A JP 12156780 A JP12156780 A JP 12156780A JP S5745921 A JPS5745921 A JP S5745921A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- layer
- crystallized
- single crystal
- crystal layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 239000010979 ruby Substances 0.000 abstract 1
- 229910001750 ruby Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Recrystallisation Techniques (AREA)
Abstract
PURPOSE:To obtain a flat single crystal layer by first dividing laser irradiation into two stages, sequentially single-crystallizing a non-single crystalline layer to be single- crystallized with a laser having sufficient energy and then again melting and solidifying it with laser light covering over the entire surface when the non-single crystalline layer is accumulated on a support and is converted into single crystal by the emission of the laser. CONSTITUTION:A polycrystalline Si layer 3 to be single-crystallized is grown through an SiO2 film 2 on a wafer support 1 movable in vertical and horizontal directions is grown, and an Ar laser beam 4 is emitted from an Ar laser emitting device 10 through a totally reflecting prism or mirror 7 and a beam converging unit 9 to the layer 3. At this time the beam 4 has small emitting area but has large energy per unit area, and is scanned to melt the layer 3 with the film 2 as crystalline nucleus and is single-crystallized. Thereafter, to erase the wavy unevenness formed on the surface, the laser beam 6 from a ruby laser emitting device 5 is irradiated through the mirror 8 and the unit 9 to the entire surface, thereby flattening the overall surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12156780A JPS5745921A (en) | 1980-09-02 | 1980-09-02 | Forming method for semiconductor single crystal layer formed with laser irradiation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12156780A JPS5745921A (en) | 1980-09-02 | 1980-09-02 | Forming method for semiconductor single crystal layer formed with laser irradiation |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5745921A true JPS5745921A (en) | 1982-03-16 |
JPH0113209B2 JPH0113209B2 (en) | 1989-03-03 |
Family
ID=14814423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12156780A Granted JPS5745921A (en) | 1980-09-02 | 1980-09-02 | Forming method for semiconductor single crystal layer formed with laser irradiation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5745921A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6247115A (en) * | 1985-08-26 | 1987-02-28 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
US5496768A (en) * | 1993-12-03 | 1996-03-05 | Casio Computer Co., Ltd. | Method of manufacturing polycrystalline silicon thin film |
US5753542A (en) * | 1985-08-02 | 1998-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for crystallizing semiconductor material without exposing it to air |
JP2004055771A (en) * | 2002-07-18 | 2004-02-19 | Nec Lcd Technologies Ltd | Method for manufacturing semiconductor thin film and laser irradiation system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52115681A (en) * | 1975-12-10 | 1977-09-28 | Shii Shii Fuan Jiyon | Method of improving crystallinity of semiconductor coating by scanning laser beam |
-
1980
- 1980-09-02 JP JP12156780A patent/JPS5745921A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52115681A (en) * | 1975-12-10 | 1977-09-28 | Shii Shii Fuan Jiyon | Method of improving crystallinity of semiconductor coating by scanning laser beam |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5753542A (en) * | 1985-08-02 | 1998-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for crystallizing semiconductor material without exposing it to air |
JPS6247115A (en) * | 1985-08-26 | 1987-02-28 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
US5496768A (en) * | 1993-12-03 | 1996-03-05 | Casio Computer Co., Ltd. | Method of manufacturing polycrystalline silicon thin film |
JP2004055771A (en) * | 2002-07-18 | 2004-02-19 | Nec Lcd Technologies Ltd | Method for manufacturing semiconductor thin film and laser irradiation system |
Also Published As
Publication number | Publication date |
---|---|
JPH0113209B2 (en) | 1989-03-03 |
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