JPS5744786A - Automatic pressure control device for vacuum vessel - Google Patents

Automatic pressure control device for vacuum vessel

Info

Publication number
JPS5744786A
JPS5744786A JP55119949A JP11994980A JPS5744786A JP S5744786 A JPS5744786 A JP S5744786A JP 55119949 A JP55119949 A JP 55119949A JP 11994980 A JP11994980 A JP 11994980A JP S5744786 A JPS5744786 A JP S5744786A
Authority
JP
Japan
Prior art keywords
vessel
pump
vacuum vessel
pressure
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55119949A
Other languages
Japanese (ja)
Inventor
Eisuke Ueda
Kaoru Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP55119949A priority Critical patent/JPS5744786A/en
Publication of JPS5744786A publication Critical patent/JPS5744786A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To miniaturize and as well as cheaply manufacture the captioned device by a method wherein a turbine molecular pump is applied for the air exhaustion of the vacuum vessel and its rotational frequency is controlled continuously.
CONSTITUTION: The vacuum vessel 21 is so constituted that the air within the vessel 21 is exhausted by means of the turbine molecular pump 23 and an oil rotary pump 24, both of which are connected in series to the vessel 21, through a valve opening variable type main valve 25, through which the gas is induced. The pressure within the vessel 21 is detected with a pressure gauge 26 and the detected pressure signal is compared with the set pressure signal in a control circuit 27, which sends a control signal to bring the difference between the above-mentioned two pressure signals to zero to a power source device 28. Because the pump 23 is driven by means of the power source device 28, rotational frequency of the pump 23 is controlled continuously.
COPYRIGHT: (C)1982,JPO&Japio
JP55119949A 1980-08-30 1980-08-30 Automatic pressure control device for vacuum vessel Pending JPS5744786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55119949A JPS5744786A (en) 1980-08-30 1980-08-30 Automatic pressure control device for vacuum vessel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55119949A JPS5744786A (en) 1980-08-30 1980-08-30 Automatic pressure control device for vacuum vessel

Publications (1)

Publication Number Publication Date
JPS5744786A true JPS5744786A (en) 1982-03-13

Family

ID=14774165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55119949A Pending JPS5744786A (en) 1980-08-30 1980-08-30 Automatic pressure control device for vacuum vessel

Country Status (1)

Country Link
JP (1) JPS5744786A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124079A (en) * 1982-01-20 1983-07-23 Furukawa Electric Co Ltd:The Pressure regulating method in vacuum pump
JPH02119688A (en) * 1988-10-28 1990-05-07 Jeol Ltd Control device of sublimation pump
US5780313A (en) * 1985-02-14 1998-07-14 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124079A (en) * 1982-01-20 1983-07-23 Furukawa Electric Co Ltd:The Pressure regulating method in vacuum pump
US5780313A (en) * 1985-02-14 1998-07-14 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating semiconductor device
JPH02119688A (en) * 1988-10-28 1990-05-07 Jeol Ltd Control device of sublimation pump

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