JPS5743890Y2 - - Google Patents

Info

Publication number
JPS5743890Y2
JPS5743890Y2 JP3754278U JP3754278U JPS5743890Y2 JP S5743890 Y2 JPS5743890 Y2 JP S5743890Y2 JP 3754278 U JP3754278 U JP 3754278U JP 3754278 U JP3754278 U JP 3754278U JP S5743890 Y2 JPS5743890 Y2 JP S5743890Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3754278U
Other languages
Japanese (ja)
Other versions
JPS54140064U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3754278U priority Critical patent/JPS5743890Y2/ja
Publication of JPS54140064U publication Critical patent/JPS54140064U/ja
Application granted granted Critical
Publication of JPS5743890Y2 publication Critical patent/JPS5743890Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3754278U 1978-03-23 1978-03-23 Expired JPS5743890Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3754278U JPS5743890Y2 (enExample) 1978-03-23 1978-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3754278U JPS5743890Y2 (enExample) 1978-03-23 1978-03-23

Publications (2)

Publication Number Publication Date
JPS54140064U JPS54140064U (enExample) 1979-09-28
JPS5743890Y2 true JPS5743890Y2 (enExample) 1982-09-28

Family

ID=28900793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3754278U Expired JPS5743890Y2 (enExample) 1978-03-23 1978-03-23

Country Status (1)

Country Link
JP (1) JPS5743890Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5579870A (en) * 1978-12-14 1980-06-16 Shinko Seiki Kk Evaporation apparatus for substance in vacuum

Also Published As

Publication number Publication date
JPS54140064U (enExample) 1979-09-28

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