JPS54140064U - - Google Patents
Info
- Publication number
- JPS54140064U JPS54140064U JP3754278U JP3754278U JPS54140064U JP S54140064 U JPS54140064 U JP S54140064U JP 3754278 U JP3754278 U JP 3754278U JP 3754278 U JP3754278 U JP 3754278U JP S54140064 U JPS54140064 U JP S54140064U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3754278U JPS5743890Y2 (enExample) | 1978-03-23 | 1978-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3754278U JPS5743890Y2 (enExample) | 1978-03-23 | 1978-03-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54140064U true JPS54140064U (enExample) | 1979-09-28 |
| JPS5743890Y2 JPS5743890Y2 (enExample) | 1982-09-28 |
Family
ID=28900793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3754278U Expired JPS5743890Y2 (enExample) | 1978-03-23 | 1978-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5743890Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5579870A (en) * | 1978-12-14 | 1980-06-16 | Shinko Seiki Kk | Evaporation apparatus for substance in vacuum |
-
1978
- 1978-03-23 JP JP3754278U patent/JPS5743890Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5579870A (en) * | 1978-12-14 | 1980-06-16 | Shinko Seiki Kk | Evaporation apparatus for substance in vacuum |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5743890Y2 (enExample) | 1982-09-28 |