JPS5742329A - Vacuum treatment device with exhaust valve controller - Google Patents

Vacuum treatment device with exhaust valve controller

Info

Publication number
JPS5742329A
JPS5742329A JP11647880A JP11647880A JPS5742329A JP S5742329 A JPS5742329 A JP S5742329A JP 11647880 A JP11647880 A JP 11647880A JP 11647880 A JP11647880 A JP 11647880A JP S5742329 A JPS5742329 A JP S5742329A
Authority
JP
Japan
Prior art keywords
vacuum treatment
exhaust valve
vacuum
chamber
treatment device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11647880A
Other languages
Japanese (ja)
Other versions
JPS6119294B2 (en
Inventor
Katsuya Okumura
Toshiaki Fujioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Ulvac Inc
Original Assignee
Toshiba Corp
Ulvac Inc
Nihon Shinku Gijutsu KK
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Ulvac Inc, Nihon Shinku Gijutsu KK, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11647880A priority Critical patent/JPS5742329A/en
Publication of JPS5742329A publication Critical patent/JPS5742329A/en
Publication of JPS6119294B2 publication Critical patent/JPS6119294B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)

Abstract

PURPOSE:To prevent a residual gas in an auxiliary chamber from flowing back into a vacuum treatment chamber by a method wherein the absolute pressures on the vacuum treatment chamber side and on the exhaust system side of a main exhaust valve for a vacuum treatment device are detected and the main exhaust valve is controlled accoding to the detection results. CONSTITUTION:In a vacuum treatment device having the auxiliary chamber 3 and the vacuum treatment chamber 1 connected to each other through an airtight gate 6, the first vacuum gage 16 and the second vacuum gage 17 are provided for respectively detecting the absolute pressure on the vacuum treatment chamber 1 side and that on the exhaust system side of the main exhaust valve 14. When the reading of the second vacuum gage 17 becomes lower than the first one 16 after the auxiliary chamber 3 is evacuated, the main exhaust valve 14 is opened in a controlled manner. By controlling the valve 14 in this manner, the residual gas in the auxiliary chamber 3 can be prevented from flowing back into the vacuum treatment chamber 1 thereby to contaminate the atmosphere in the latter.
JP11647880A 1980-08-26 1980-08-26 Vacuum treatment device with exhaust valve controller Granted JPS5742329A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11647880A JPS5742329A (en) 1980-08-26 1980-08-26 Vacuum treatment device with exhaust valve controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11647880A JPS5742329A (en) 1980-08-26 1980-08-26 Vacuum treatment device with exhaust valve controller

Publications (2)

Publication Number Publication Date
JPS5742329A true JPS5742329A (en) 1982-03-09
JPS6119294B2 JPS6119294B2 (en) 1986-05-16

Family

ID=14688093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11647880A Granted JPS5742329A (en) 1980-08-26 1980-08-26 Vacuum treatment device with exhaust valve controller

Country Status (1)

Country Link
JP (1) JPS5742329A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102974588A (en) * 2012-09-27 2013-03-20 北京七星华创电子股份有限公司 Technology chamber air exhaust system and air exhaust method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS517531A (en) * 1974-07-08 1976-01-21 Murata Manufacturing Co ATSURYOKUSAORYOSHITA JIDOKAI HEISOCHI

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS517531A (en) * 1974-07-08 1976-01-21 Murata Manufacturing Co ATSURYOKUSAORYOSHITA JIDOKAI HEISOCHI

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102974588A (en) * 2012-09-27 2013-03-20 北京七星华创电子股份有限公司 Technology chamber air exhaust system and air exhaust method

Also Published As

Publication number Publication date
JPS6119294B2 (en) 1986-05-16

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