JPS5742174Y2 - - Google Patents

Info

Publication number
JPS5742174Y2
JPS5742174Y2 JP1978104411U JP10441178U JPS5742174Y2 JP S5742174 Y2 JPS5742174 Y2 JP S5742174Y2 JP 1978104411 U JP1978104411 U JP 1978104411U JP 10441178 U JP10441178 U JP 10441178U JP S5742174 Y2 JPS5742174 Y2 JP S5742174Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978104411U
Other languages
Japanese (ja)
Other versions
JPS5522140U (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978104411U priority Critical patent/JPS5742174Y2/ja
Publication of JPS5522140U publication Critical patent/JPS5522140U/ja
Application granted granted Critical
Publication of JPS5742174Y2 publication Critical patent/JPS5742174Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1978104411U 1978-07-28 1978-07-28 Expired JPS5742174Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978104411U JPS5742174Y2 (zh) 1978-07-28 1978-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978104411U JPS5742174Y2 (zh) 1978-07-28 1978-07-28

Publications (2)

Publication Number Publication Date
JPS5522140U JPS5522140U (zh) 1980-02-13
JPS5742174Y2 true JPS5742174Y2 (zh) 1982-09-17

Family

ID=29045778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978104411U Expired JPS5742174Y2 (zh) 1978-07-28 1978-07-28

Country Status (1)

Country Link
JP (1) JPS5742174Y2 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0323497Y2 (zh) * 1984-12-19 1991-05-22
JPS61215289A (ja) * 1985-03-19 1986-09-25 Toshiba Mach Co Ltd 気相成長装置
JPH0727870B2 (ja) * 1987-12-24 1995-03-29 東横化学株式会社 減圧気相成長方法
JPH0713217Y2 (ja) * 1988-09-24 1995-03-29 株式会社リコー 半導体製造装置の下部電極
JP4019998B2 (ja) * 2003-04-14 2007-12-12 信越半導体株式会社 サセプタ及び気相成長装置
JP5668275B2 (ja) * 2009-04-08 2015-02-12 株式会社Sumco Ｓｏｉウェーハの製造方法及び貼り合わせ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5012971A (zh) * 1973-06-04 1975-02-10
JPS52146174A (en) * 1976-05-29 1977-12-05 Toshiba Corp Susceptor for vapor growth of semiconductor
JPS5378765A (en) * 1976-12-23 1978-07-12 Toshiba Corp Semiconductor wafer heating stand for gas phase growth

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5012971A (zh) * 1973-06-04 1975-02-10
JPS52146174A (en) * 1976-05-29 1977-12-05 Toshiba Corp Susceptor for vapor growth of semiconductor
JPS5378765A (en) * 1976-12-23 1978-07-12 Toshiba Corp Semiconductor wafer heating stand for gas phase growth

Also Published As

Publication number Publication date
JPS5522140U (zh) 1980-02-13

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