JPS5742004A - Optical scanning mirror - Google Patents

Optical scanning mirror

Info

Publication number
JPS5742004A
JPS5742004A JP55118034A JP11803480A JPS5742004A JP S5742004 A JPS5742004 A JP S5742004A JP 55118034 A JP55118034 A JP 55118034A JP 11803480 A JP11803480 A JP 11803480A JP S5742004 A JPS5742004 A JP S5742004A
Authority
JP
Japan
Prior art keywords
planes
silicon wafer
production steps
polyhedron
optical scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55118034A
Other languages
Japanese (ja)
Other versions
JPS614090B2 (en
Inventor
Akira Ote
Muneki Ran
Hideto Iwaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP55118034A priority Critical patent/JPS5742004A/en
Publication of JPS5742004A publication Critical patent/JPS5742004A/en
Publication of JPS614090B2 publication Critical patent/JPS614090B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors

Abstract

PURPOSE:To reduce the number of production steps by cutting out a polyhedron formed by an anisotropic etching method using a silicon wafer and finishing the surface thereof to a specular surface. CONSTITUTION:A vapor deposition film of a square shape (about 8X8mm.<2>) is provided at an equal space in the two directions X, Y of the (100) planes of a silicon wafer, and is anisotropically etched with an aqueous NaOH soln. or the like. The (111) planes are etched at an angle of 54.7 deg. with respect to a horizontal plane. This polyhedron is cut out, and if necessary, it is polished or is vapor-deposited with Al, and a rotating shaft 20 is mounted, whereby a rotary polyhedral mirror is obtained. Thereby, the number of production steps is reduced.
JP55118034A 1980-08-27 1980-08-27 Optical scanning mirror Granted JPS5742004A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55118034A JPS5742004A (en) 1980-08-27 1980-08-27 Optical scanning mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55118034A JPS5742004A (en) 1980-08-27 1980-08-27 Optical scanning mirror

Publications (2)

Publication Number Publication Date
JPS5742004A true JPS5742004A (en) 1982-03-09
JPS614090B2 JPS614090B2 (en) 1986-02-06

Family

ID=14726404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55118034A Granted JPS5742004A (en) 1980-08-27 1980-08-27 Optical scanning mirror

Country Status (1)

Country Link
JP (1) JPS5742004A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6137121A (en) * 1997-10-01 2000-10-24 Mitsubishi Denki Kabushiki Kaisha Integrated semiconductor light generating and detecting device
JP2006039046A (en) * 2004-07-23 2006-02-09 Shinko Electric Ind Co Ltd Optical waveguide mounting member, substrate, semiconductor device, manufacturing method of optical waveguide mounting member, and manufacturing method of substrate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6137121A (en) * 1997-10-01 2000-10-24 Mitsubishi Denki Kabushiki Kaisha Integrated semiconductor light generating and detecting device
JP2006039046A (en) * 2004-07-23 2006-02-09 Shinko Electric Ind Co Ltd Optical waveguide mounting member, substrate, semiconductor device, manufacturing method of optical waveguide mounting member, and manufacturing method of substrate
JP4558400B2 (en) * 2004-07-23 2010-10-06 新光電気工業株式会社 Semiconductor device

Also Published As

Publication number Publication date
JPS614090B2 (en) 1986-02-06

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