JPS5740648B2 - - Google Patents

Info

Publication number
JPS5740648B2
JPS5740648B2 JP4103075A JP4103075A JPS5740648B2 JP S5740648 B2 JPS5740648 B2 JP S5740648B2 JP 4103075 A JP4103075 A JP 4103075A JP 4103075 A JP4103075 A JP 4103075A JP S5740648 B2 JPS5740648 B2 JP S5740648B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4103075A
Other languages
Japanese (ja)
Other versions
JPS51115770A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4103075A priority Critical patent/JPS51115770A/ja
Publication of JPS51115770A publication Critical patent/JPS51115770A/ja
Publication of JPS5740648B2 publication Critical patent/JPS5740648B2/ja
Granted legal-status Critical Current

Links

JP4103075A 1975-04-03 1975-04-03 Annealing method after ion injection Granted JPS51115770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4103075A JPS51115770A (en) 1975-04-03 1975-04-03 Annealing method after ion injection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4103075A JPS51115770A (en) 1975-04-03 1975-04-03 Annealing method after ion injection

Publications (2)

Publication Number Publication Date
JPS51115770A JPS51115770A (en) 1976-10-12
JPS5740648B2 true JPS5740648B2 (US07534539-20090519-C00280.png) 1982-08-28

Family

ID=12596989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4103075A Granted JPS51115770A (en) 1975-04-03 1975-04-03 Annealing method after ion injection

Country Status (1)

Country Link
JP (1) JPS51115770A (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0218304Y2 (US07534539-20090519-C00280.png) * 1988-08-01 1990-05-22

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5556637A (en) * 1978-10-20 1980-04-25 Matsushita Electric Ind Co Ltd Preparation of semiconductor device
JPS5873112A (ja) * 1981-10-28 1983-05-02 Nippon Hoso Kyokai <Nhk> レ−ザアニ−ル方法
JPH0697664B2 (ja) * 1984-05-11 1994-11-30 住友電気工業株式会社 化合物半導体のアニ−ル法
JPS6211225A (ja) * 1986-07-18 1987-01-20 Sony Corp 3−v族化合物半導体の熱処理法
JP2582741B2 (ja) * 1991-11-07 1997-02-19 株式会社日本製鋼所 エピタキシャル薄膜の形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0218304Y2 (US07534539-20090519-C00280.png) * 1988-08-01 1990-05-22

Also Published As

Publication number Publication date
JPS51115770A (en) 1976-10-12

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