JPS5739549A - Sorting device for photosemiconductor - Google Patents

Sorting device for photosemiconductor

Info

Publication number
JPS5739549A
JPS5739549A JP11478280A JP11478280A JPS5739549A JP S5739549 A JPS5739549 A JP S5739549A JP 11478280 A JP11478280 A JP 11478280A JP 11478280 A JP11478280 A JP 11478280A JP S5739549 A JPS5739549 A JP S5739549A
Authority
JP
Japan
Prior art keywords
photosemiconductor
electric signal
alternating current
output
photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11478280A
Other languages
Japanese (ja)
Inventor
Satoru Todoroki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11478280A priority Critical patent/JPS5739549A/en
Publication of JPS5739549A publication Critical patent/JPS5739549A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To rapidly and quantitatively sort photosemiconductor of irregular light emission in accordance with the defect of crystal by flowing a direct current superposed with an alternating current on the photosemiconductor, converting a photo- output into an electric signal via an avalanche diode and measuring the high frequency distortion of the electric signal. CONSTITUTION:A direct current superposed with an alternating current from an AC signal generator 3 is applied to a photosemiconductor 1 to be detected. The photosemiconductor 1 produces an output faithful for the applied alternating current when no defect exists in the crystal and produces a photo-output containing high harmonic component of the applied alternating current when a defect exists in the crystal. This photo-output is transmitted via a sleeve 5 to the photodetecting surface of the avalanche photodiode 6, which in turn flows an electric signal responsive to the input light to a load resistance 7. This electric signal is supplied to a spectrum analyzer 8, which measures the high frequency distortion, thereby sorting the malfunction of the photosemiconductor. In this manner, improper photosemiconductor can be quantatively and rapidly sorted.
JP11478280A 1980-08-22 1980-08-22 Sorting device for photosemiconductor Pending JPS5739549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11478280A JPS5739549A (en) 1980-08-22 1980-08-22 Sorting device for photosemiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11478280A JPS5739549A (en) 1980-08-22 1980-08-22 Sorting device for photosemiconductor

Publications (1)

Publication Number Publication Date
JPS5739549A true JPS5739549A (en) 1982-03-04

Family

ID=14646535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11478280A Pending JPS5739549A (en) 1980-08-22 1980-08-22 Sorting device for photosemiconductor

Country Status (1)

Country Link
JP (1) JPS5739549A (en)

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