JPS5733704B2 - - Google Patents
Info
- Publication number
- JPS5733704B2 JPS5733704B2 JP12846573A JP12846573A JPS5733704B2 JP S5733704 B2 JPS5733704 B2 JP S5733704B2 JP 12846573 A JP12846573 A JP 12846573A JP 12846573 A JP12846573 A JP 12846573A JP S5733704 B2 JPS5733704 B2 JP S5733704B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12846573A JPS5733704B2 (en) | 1973-11-15 | 1973-11-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12846573A JPS5733704B2 (en) | 1973-11-15 | 1973-11-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5081063A JPS5081063A (en) | 1975-07-01 |
JPS5733704B2 true JPS5733704B2 (en) | 1982-07-19 |
Family
ID=14985379
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12846573A Expired JPS5733704B2 (en) | 1973-11-15 | 1973-11-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5733704B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5664453A (en) * | 1979-10-31 | 1981-06-01 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor device |
JPS58165364A (en) * | 1982-03-26 | 1983-09-30 | Agency Of Ind Science & Technol | Manufacture of three-dimensional circuit element |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852185A (en) * | 1971-10-29 | 1973-07-21 |
-
1973
- 1973-11-15 JP JP12846573A patent/JPS5733704B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4852185A (en) * | 1971-10-29 | 1973-07-21 |
Also Published As
Publication number | Publication date |
---|---|
JPS5081063A (en) | 1975-07-01 |