JPS5081063A - - Google Patents

Info

Publication number
JPS5081063A
JPS5081063A JP12846573A JP12846573A JPS5081063A JP S5081063 A JPS5081063 A JP S5081063A JP 12846573 A JP12846573 A JP 12846573A JP 12846573 A JP12846573 A JP 12846573A JP S5081063 A JPS5081063 A JP S5081063A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12846573A
Other languages
Japanese (ja)
Other versions
JPS5733704B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12846573A priority Critical patent/JPS5733704B2/ja
Publication of JPS5081063A publication Critical patent/JPS5081063A/ja
Publication of JPS5733704B2 publication Critical patent/JPS5733704B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP12846573A 1973-11-15 1973-11-15 Expired JPS5733704B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12846573A JPS5733704B2 (en) 1973-11-15 1973-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12846573A JPS5733704B2 (en) 1973-11-15 1973-11-15

Publications (2)

Publication Number Publication Date
JPS5081063A true JPS5081063A (en) 1975-07-01
JPS5733704B2 JPS5733704B2 (en) 1982-07-19

Family

ID=14985379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12846573A Expired JPS5733704B2 (en) 1973-11-15 1973-11-15

Country Status (1)

Country Link
JP (1) JPS5733704B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664453A (en) * 1979-10-31 1981-06-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS58165364A (en) * 1982-03-26 1983-09-30 Agency Of Ind Science & Technol Manufacture of three-dimensional circuit element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852185A (en) * 1971-10-29 1973-07-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852185A (en) * 1971-10-29 1973-07-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664453A (en) * 1979-10-31 1981-06-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS58165364A (en) * 1982-03-26 1983-09-30 Agency Of Ind Science & Technol Manufacture of three-dimensional circuit element

Also Published As

Publication number Publication date
JPS5733704B2 (en) 1982-07-19

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