JPS5731125B2 - - Google Patents
Info
- Publication number
- JPS5731125B2 JPS5731125B2 JP2547278A JP2547278A JPS5731125B2 JP S5731125 B2 JPS5731125 B2 JP S5731125B2 JP 2547278 A JP2547278 A JP 2547278A JP 2547278 A JP2547278 A JP 2547278A JP S5731125 B2 JPS5731125 B2 JP S5731125B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Photoreceptors In Electrophotography (AREA)
- Drying Of Semiconductors (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2547278A JPS54118776A (en) | 1978-03-08 | 1978-03-08 | Pattern forming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2547278A JPS54118776A (en) | 1978-03-08 | 1978-03-08 | Pattern forming method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54118776A JPS54118776A (en) | 1979-09-14 |
| JPS5731125B2 true JPS5731125B2 (en) | 1982-07-02 |
Family
ID=12166972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2547278A Granted JPS54118776A (en) | 1978-03-08 | 1978-03-08 | Pattern forming method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54118776A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0197950A (en) * | 1986-09-01 | 1989-04-17 | Sanyo Electric Co Ltd | Polymeric radiation sensitive material |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49103632A (en) * | 1972-12-21 | 1974-10-01 | Philips Nv | |
| JPS511971A (en) * | 1974-06-25 | 1976-01-09 | Meidensha Electric Mfg Co Ltd | Kaiheikino sosasochi |
| JPS51105353A (en) * | 1975-03-07 | 1976-09-17 | Hitachi Ltd | DENSHISENKANNOSEIKOBUNSHISOSEIBUTSU |
| JPS5218097A (en) * | 1975-07-31 | 1977-02-10 | Matsushita Electric Works Ltd | Sprinkler |
| JPS52153672A (en) * | 1976-06-16 | 1977-12-20 | Matsushita Electric Ind Co Ltd | Electron beam resist and its usage |
| JPS5499621A (en) * | 1977-12-24 | 1979-08-06 | Licentia Gmbh | Radiant ray sensitive material having positive operation |
-
1978
- 1978-03-08 JP JP2547278A patent/JPS54118776A/en active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49103632A (en) * | 1972-12-21 | 1974-10-01 | Philips Nv | |
| JPS511971A (en) * | 1974-06-25 | 1976-01-09 | Meidensha Electric Mfg Co Ltd | Kaiheikino sosasochi |
| JPS51105353A (en) * | 1975-03-07 | 1976-09-17 | Hitachi Ltd | DENSHISENKANNOSEIKOBUNSHISOSEIBUTSU |
| JPS5218097A (en) * | 1975-07-31 | 1977-02-10 | Matsushita Electric Works Ltd | Sprinkler |
| JPS52153672A (en) * | 1976-06-16 | 1977-12-20 | Matsushita Electric Ind Co Ltd | Electron beam resist and its usage |
| JPS5499621A (en) * | 1977-12-24 | 1979-08-06 | Licentia Gmbh | Radiant ray sensitive material having positive operation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54118776A (en) | 1979-09-14 |