JPS5730907B2 - - Google Patents

Info

Publication number
JPS5730907B2
JPS5730907B2 JP10161279A JP10161279A JPS5730907B2 JP S5730907 B2 JPS5730907 B2 JP S5730907B2 JP 10161279 A JP10161279 A JP 10161279A JP 10161279 A JP10161279 A JP 10161279A JP S5730907 B2 JPS5730907 B2 JP S5730907B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10161279A
Other versions
JPS5625972A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10161279A priority Critical patent/JPS5625972A/ja
Publication of JPS5625972A publication Critical patent/JPS5625972A/ja
Publication of JPS5730907B2 publication Critical patent/JPS5730907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP10161279A 1979-08-09 1979-08-09 Etching treatment by plasma Granted JPS5625972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10161279A JPS5625972A (en) 1979-08-09 1979-08-09 Etching treatment by plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10161279A JPS5625972A (en) 1979-08-09 1979-08-09 Etching treatment by plasma

Publications (2)

Publication Number Publication Date
JPS5625972A JPS5625972A (en) 1981-03-12
JPS5730907B2 true JPS5730907B2 (ja) 1982-07-01

Family

ID=14305216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10161279A Granted JPS5625972A (en) 1979-08-09 1979-08-09 Etching treatment by plasma

Country Status (1)

Country Link
JP (1) JPS5625972A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6345512Y2 (ja) * 1982-11-15 1988-11-25

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117539A (ja) * 1981-12-30 1983-07-13 Tokyo Denshi Kagaku Kabushiki 乾式現像の終点検知方法
JPS58218121A (ja) * 1982-06-11 1983-12-19 Anelva Corp シリコンのドライエツチングモニタリング方法
JPS6389684A (ja) * 1986-10-01 1988-04-20 Hitachi Electronics Eng Co Ltd クリ−ニング終点検出方式

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364636A (en) * 1976-11-22 1978-06-09 Nippon Telegraph & Telephone Dry etching device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364636A (en) * 1976-11-22 1978-06-09 Nippon Telegraph & Telephone Dry etching device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6345512Y2 (ja) * 1982-11-15 1988-11-25

Also Published As

Publication number Publication date
JPS5625972A (en) 1981-03-12

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