JPS5729309Y2 - - Google Patents
Info
- Publication number
- JPS5729309Y2 JPS5729309Y2 JP1977040219U JP4021977U JPS5729309Y2 JP S5729309 Y2 JPS5729309 Y2 JP S5729309Y2 JP 1977040219 U JP1977040219 U JP 1977040219U JP 4021977 U JP4021977 U JP 4021977U JP S5729309 Y2 JPS5729309 Y2 JP S5729309Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977040219U JPS5729309Y2 (https=) | 1977-03-30 | 1977-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977040219U JPS5729309Y2 (https=) | 1977-03-30 | 1977-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53134663U JPS53134663U (https=) | 1978-10-25 |
| JPS5729309Y2 true JPS5729309Y2 (https=) | 1982-06-26 |
Family
ID=28908521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977040219U Expired JPS5729309Y2 (https=) | 1977-03-30 | 1977-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5729309Y2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848416A (ja) * | 1981-09-16 | 1983-03-22 | Fuji Electric Corp Res & Dev Ltd | 量産型薄膜生成装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013585B2 (ja) * | 1977-08-03 | 1985-04-08 | パイオニア株式会社 | 信号圧縮伸長装置 |
-
1977
- 1977-03-30 JP JP1977040219U patent/JPS5729309Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53134663U (https=) | 1978-10-25 |