JPS5728181B2 - - Google Patents
Info
- Publication number
- JPS5728181B2 JPS5728181B2 JP12187875A JP12187875A JPS5728181B2 JP S5728181 B2 JPS5728181 B2 JP S5728181B2 JP 12187875 A JP12187875 A JP 12187875A JP 12187875 A JP12187875 A JP 12187875A JP S5728181 B2 JPS5728181 B2 JP S5728181B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12187875A JPS5246756A (en) | 1975-10-11 | 1975-10-11 | Field-emission type electron gun |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12187875A JPS5246756A (en) | 1975-10-11 | 1975-10-11 | Field-emission type electron gun |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5246756A JPS5246756A (en) | 1977-04-13 |
JPS5728181B2 true JPS5728181B2 (xx) | 1982-06-15 |
Family
ID=14822148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12187875A Granted JPS5246756A (en) | 1975-10-11 | 1975-10-11 | Field-emission type electron gun |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5246756A (xx) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5956386U (ja) * | 1982-10-06 | 1984-04-12 | 株式会社電業社機械製作所 | 暗渠式ポンプ取水槽の渦流防止装置 |
JPS61130800U (xx) * | 1985-02-05 | 1986-08-15 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6328857Y2 (xx) * | 1981-06-22 | 1988-08-03 | ||
JPH0722009B2 (ja) * | 1982-06-21 | 1995-03-08 | 株式会社日立製作所 | 電界放射電子銃 |
EP1760761B1 (en) | 2005-09-05 | 2017-10-18 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam emitting device and method for operating a charged particle beam emitting device |
JP5514472B2 (ja) * | 2008-05-28 | 2014-06-04 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP5455700B2 (ja) * | 2010-02-18 | 2014-03-26 | 株式会社日立ハイテクノロジーズ | 電界放出電子銃及びその制御方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49110261A (xx) * | 1973-02-21 | 1974-10-21 |
-
1975
- 1975-10-11 JP JP12187875A patent/JPS5246756A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49110261A (xx) * | 1973-02-21 | 1974-10-21 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5956386U (ja) * | 1982-10-06 | 1984-04-12 | 株式会社電業社機械製作所 | 暗渠式ポンプ取水槽の渦流防止装置 |
JPS61130800U (xx) * | 1985-02-05 | 1986-08-15 |
Also Published As
Publication number | Publication date |
---|---|
JPS5246756A (en) | 1977-04-13 |