JPS5728181B2 - - Google Patents

Info

Publication number
JPS5728181B2
JPS5728181B2 JP12187875A JP12187875A JPS5728181B2 JP S5728181 B2 JPS5728181 B2 JP S5728181B2 JP 12187875 A JP12187875 A JP 12187875A JP 12187875 A JP12187875 A JP 12187875A JP S5728181 B2 JPS5728181 B2 JP S5728181B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12187875A
Other languages
Japanese (ja)
Other versions
JPS5246756A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12187875A priority Critical patent/JPS5246756A/ja
Publication of JPS5246756A publication Critical patent/JPS5246756A/ja
Publication of JPS5728181B2 publication Critical patent/JPS5728181B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP12187875A 1975-10-11 1975-10-11 Field-emission type electron gun Granted JPS5246756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12187875A JPS5246756A (en) 1975-10-11 1975-10-11 Field-emission type electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12187875A JPS5246756A (en) 1975-10-11 1975-10-11 Field-emission type electron gun

Publications (2)

Publication Number Publication Date
JPS5246756A JPS5246756A (en) 1977-04-13
JPS5728181B2 true JPS5728181B2 (xx) 1982-06-15

Family

ID=14822148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12187875A Granted JPS5246756A (en) 1975-10-11 1975-10-11 Field-emission type electron gun

Country Status (1)

Country Link
JP (1) JPS5246756A (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956386U (ja) * 1982-10-06 1984-04-12 株式会社電業社機械製作所 暗渠式ポンプ取水槽の渦流防止装置
JPS61130800U (xx) * 1985-02-05 1986-08-15

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6328857Y2 (xx) * 1981-06-22 1988-08-03
JPH0722009B2 (ja) * 1982-06-21 1995-03-08 株式会社日立製作所 電界放射電子銃
EP1760761B1 (en) 2005-09-05 2017-10-18 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam emitting device and method for operating a charged particle beam emitting device
JP5514472B2 (ja) * 2008-05-28 2014-06-04 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP5455700B2 (ja) * 2010-02-18 2014-03-26 株式会社日立ハイテクノロジーズ 電界放出電子銃及びその制御方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49110261A (xx) * 1973-02-21 1974-10-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49110261A (xx) * 1973-02-21 1974-10-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956386U (ja) * 1982-10-06 1984-04-12 株式会社電業社機械製作所 暗渠式ポンプ取水槽の渦流防止装置
JPS61130800U (xx) * 1985-02-05 1986-08-15

Also Published As

Publication number Publication date
JPS5246756A (en) 1977-04-13

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