JPS5726840A - Optical system for projection lithographic device - Google Patents

Optical system for projection lithographic device

Info

Publication number
JPS5726840A
JPS5726840A JP6428881A JP6428881A JPS5726840A JP S5726840 A JPS5726840 A JP S5726840A JP 6428881 A JP6428881 A JP 6428881A JP 6428881 A JP6428881 A JP 6428881A JP S5726840 A JPS5726840 A JP S5726840A
Authority
JP
Japan
Prior art keywords
optical system
lithographic device
projection lithographic
projection
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6428881A
Other languages
English (en)
Japanese (ja)
Inventor
Kuringenfueruto Deiitomaa
Dasuteisu Rainaa
Hetsuse Rainaa
Resuraa Manfureeto
Zaide Urufugangu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of JPS5726840A publication Critical patent/JPS5726840A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
JP6428881A 1980-06-02 1981-04-30 Optical system for projection lithographic device Pending JPS5726840A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD22151080A DD151231A1 (de) 1980-06-02 1980-06-02 Optische anordnung fuer projektionslithografische einrichtungen

Publications (1)

Publication Number Publication Date
JPS5726840A true JPS5726840A (en) 1982-02-13

Family

ID=5524469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6428881A Pending JPS5726840A (en) 1980-06-02 1981-04-30 Optical system for projection lithographic device

Country Status (4)

Country Link
JP (1) JPS5726840A (de)
DD (1) DD151231A1 (de)
DE (1) DE3112606A1 (de)
FR (1) FR2483641A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5288586A (en) * 1990-06-20 1994-02-22 Fuji Photo Film Co., Ltd. Image-foring process using microcapsules
US6081578A (en) * 1997-11-07 2000-06-27 U.S. Philips Corporation Three-mirror system for lithographic projection, and projection apparatus comprising such a mirror system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117297A (en) * 1974-08-02 1976-02-12 Bridgestone Tire Co Ltd Horiooruo horiuretanjugobutsukara kaishusuruhoho

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7412033A (nl) * 1973-09-17 1975-03-19 Siemens Ag Inrichting voor het justeren van halfgeleider- schijven ten opzichte van een bestralingsmasker, voor het vormen van een struktuur in fotolak door bestraling met roentgenstralen.
NL7606548A (nl) * 1976-06-17 1977-12-20 Philips Nv Werkwijze en inrichting voor het uitrichten van een i.c.-patroon ten opzichte van een halfgelei- dend substraat.
JPS5391754A (en) * 1977-01-21 1978-08-11 Canon Inc Scannint type photo detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117297A (en) * 1974-08-02 1976-02-12 Bridgestone Tire Co Ltd Horiooruo horiuretanjugobutsukara kaishusuruhoho

Also Published As

Publication number Publication date
FR2483641A1 (fr) 1981-12-04
DD151231A1 (de) 1981-10-08
DE3112606A1 (de) 1982-02-25

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