JPS57257U - - Google Patents
Info
- Publication number
- JPS57257U JPS57257U JP7260380U JP7260380U JPS57257U JP S57257 U JPS57257 U JP S57257U JP 7260380 U JP7260380 U JP 7260380U JP 7260380 U JP7260380 U JP 7260380U JP S57257 U JPS57257 U JP S57257U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Conveying Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980072603U JPS6142199Y2 (en) | 1980-05-27 | 1980-05-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980072603U JPS6142199Y2 (en) | 1980-05-27 | 1980-05-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57257U true JPS57257U (en) | 1982-01-05 |
JPS6142199Y2 JPS6142199Y2 (en) | 1986-12-01 |
Family
ID=29435774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1980072603U Expired JPS6142199Y2 (en) | 1980-05-27 | 1980-05-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6142199Y2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS563662U (en) * | 1979-06-20 | 1981-01-13 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5373075A (en) * | 1976-12-13 | 1978-06-29 | Fujitsu Ltd | Treatment method for wafer surface |
-
1980
- 1980-05-27 JP JP1980072603U patent/JPS6142199Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS563662U (en) * | 1979-06-20 | 1981-01-13 |
Also Published As
Publication number | Publication date |
---|---|
JPS6142199Y2 (en) | 1986-12-01 |