JPS5724631A - Formation of compound by ion injection - Google Patents

Formation of compound by ion injection

Info

Publication number
JPS5724631A
JPS5724631A JP10038580A JP10038580A JPS5724631A JP S5724631 A JPS5724631 A JP S5724631A JP 10038580 A JP10038580 A JP 10038580A JP 10038580 A JP10038580 A JP 10038580A JP S5724631 A JPS5724631 A JP S5724631A
Authority
JP
Japan
Prior art keywords
compound
ions
atoms
elements
ion injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10038580A
Other languages
Japanese (ja)
Inventor
Satoshi Maeyama
Kenji Kajiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP10038580A priority Critical patent/JPS5724631A/en
Publication of JPS5724631A publication Critical patent/JPS5724631A/en
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To form a compound by injection of ions according to the number of atoms in a short time by using ions composed of plural atoms as an injection rate of ions.
CONSTITUTION: In a method of forming a compound in which a base material is subjected to an ion injection treatment using elements different from the constituent elements of the base material or a substance containing the elements, ions composed of a large number of atoms more than two or more the constituent elements or the elements of the substance containing the constituent elements are used as an injection rate of ions during the ion injection treatment. Thus, an objective compound with stoichiometric composition ratio can be formed in a short time according to the number of the atoms.
COPYRIGHT: (C)1982,JPO&Japio
JP10038580A 1980-07-22 1980-07-22 Formation of compound by ion injection Pending JPS5724631A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10038580A JPS5724631A (en) 1980-07-22 1980-07-22 Formation of compound by ion injection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10038580A JPS5724631A (en) 1980-07-22 1980-07-22 Formation of compound by ion injection

Publications (1)

Publication Number Publication Date
JPS5724631A true JPS5724631A (en) 1982-02-09

Family

ID=14272538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10038580A Pending JPS5724631A (en) 1980-07-22 1980-07-22 Formation of compound by ion injection

Country Status (1)

Country Link
JP (1) JPS5724631A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331871A (en) * 1976-09-02 1978-03-25 Kao Corp Bleaching agent composition safe to color of textile goods

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331871A (en) * 1976-09-02 1978-03-25 Kao Corp Bleaching agent composition safe to color of textile goods

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