JPS5724485B2 - - Google Patents
Info
- Publication number
- JPS5724485B2 JPS5724485B2 JP7773077A JP7773077A JPS5724485B2 JP S5724485 B2 JPS5724485 B2 JP S5724485B2 JP 7773077 A JP7773077 A JP 7773077A JP 7773077 A JP7773077 A JP 7773077A JP S5724485 B2 JPS5724485 B2 JP S5724485B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7773077A JPS5413367A (en) | 1977-07-01 | 1977-07-01 | Method of controlling thickness of evaporated film in photoelectric type film thickness meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7773077A JPS5413367A (en) | 1977-07-01 | 1977-07-01 | Method of controlling thickness of evaporated film in photoelectric type film thickness meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5413367A JPS5413367A (en) | 1979-01-31 |
| JPS5724485B2 true JPS5724485B2 (ja) | 1982-05-25 |
Family
ID=13642007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7773077A Granted JPS5413367A (en) | 1977-07-01 | 1977-07-01 | Method of controlling thickness of evaporated film in photoelectric type film thickness meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5413367A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0552648B1 (en) * | 1992-01-17 | 1997-04-09 | Matsushita Electric Industrial Co., Ltd. | Method of and apparatus for forming a multi-layer film |
| JP2006009117A (ja) * | 2004-06-29 | 2006-01-12 | Hoya Corp | 薄膜形成装置及び方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60242307A (ja) * | 1984-05-17 | 1985-12-02 | Matsushita Electric Ind Co Ltd | 膜厚制御方法 |
| US20040032591A1 (en) | 2002-01-04 | 2004-02-19 | Takahiro Itoh | Wavelength determining apparatus, method and program for thin film thickness monitoring light |
-
1977
- 1977-07-01 JP JP7773077A patent/JPS5413367A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0552648B1 (en) * | 1992-01-17 | 1997-04-09 | Matsushita Electric Industrial Co., Ltd. | Method of and apparatus for forming a multi-layer film |
| JP2006009117A (ja) * | 2004-06-29 | 2006-01-12 | Hoya Corp | 薄膜形成装置及び方法 |
| JP4491289B2 (ja) * | 2004-06-29 | 2010-06-30 | Ｈｏｙａ株式会社 | 薄膜形成装置及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5413367A (en) | 1979-01-31 |