JPS5721700B2 - - Google Patents
Info
- Publication number
- JPS5721700B2 JPS5721700B2 JP6636476A JP6636476A JPS5721700B2 JP S5721700 B2 JPS5721700 B2 JP S5721700B2 JP 6636476 A JP6636476 A JP 6636476A JP 6636476 A JP6636476 A JP 6636476A JP S5721700 B2 JPS5721700 B2 JP S5721700B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6636476A JPS52149116A (en) | 1976-06-07 | 1976-06-07 | Method of forming xxray image |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6636476A JPS52149116A (en) | 1976-06-07 | 1976-06-07 | Method of forming xxray image |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52149116A JPS52149116A (en) | 1977-12-12 |
| JPS5721700B2 true JPS5721700B2 (ar) | 1982-05-08 |
Family
ID=13313710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6636476A Granted JPS52149116A (en) | 1976-06-07 | 1976-06-07 | Method of forming xxray image |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52149116A (ar) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS598384Y2 (ja) * | 1979-01-04 | 1984-03-15 | 松下電器産業株式会社 | 音響機器 |
| JPS6081158A (ja) * | 1983-10-11 | 1985-05-09 | Hitachi Ltd | 放射線感応物質 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS497495A (ar) * | 1972-05-25 | 1974-01-23 | ||
| JPS4912902A (ar) * | 1972-05-16 | 1974-02-04 | ||
| JPS5187971A (en) * | 1975-01-29 | 1976-07-31 | Ibm | Denjiimushoshanyoru rejisutozo no keiseihoho |
| JPS5290269A (en) * | 1976-01-23 | 1977-07-29 | Nippon Telegr & Teleph Corp <Ntt> | Forming method for fine resist patterns |
-
1976
- 1976-06-07 JP JP6636476A patent/JPS52149116A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4912902A (ar) * | 1972-05-16 | 1974-02-04 | ||
| JPS497495A (ar) * | 1972-05-25 | 1974-01-23 | ||
| JPS5187971A (en) * | 1975-01-29 | 1976-07-31 | Ibm | Denjiimushoshanyoru rejisutozo no keiseihoho |
| JPS5290269A (en) * | 1976-01-23 | 1977-07-29 | Nippon Telegr & Teleph Corp <Ntt> | Forming method for fine resist patterns |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52149116A (en) | 1977-12-12 |