JPS5721669U - - Google Patents
Info
- Publication number
- JPS5721669U JPS5721669U JP9692780U JP9692780U JPS5721669U JP S5721669 U JPS5721669 U JP S5721669U JP 9692780 U JP9692780 U JP 9692780U JP 9692780 U JP9692780 U JP 9692780U JP S5721669 U JPS5721669 U JP S5721669U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9692780U JPS5721669U (ja) | 1980-07-11 | 1980-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9692780U JPS5721669U (ja) | 1980-07-11 | 1980-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5721669U true JPS5721669U (ja) | 1982-02-04 |
Family
ID=29458738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9692780U Pending JPS5721669U (ja) | 1980-07-11 | 1980-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5721669U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5973045A (ja) * | 1982-10-19 | 1984-04-25 | Inoue Japax Res Inc | 表面被覆方法 |
| JPH07183217A (ja) * | 1993-12-22 | 1995-07-21 | Nec Corp | アモルファスシリコン膜の形成方法 |
-
1980
- 1980-07-11 JP JP9692780U patent/JPS5721669U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5973045A (ja) * | 1982-10-19 | 1984-04-25 | Inoue Japax Res Inc | 表面被覆方法 |
| JPH07183217A (ja) * | 1993-12-22 | 1995-07-21 | Nec Corp | アモルファスシリコン膜の形成方法 |