JPS57207866A - Potential sensor - Google Patents

Abstract

PURPOSE:To simplify a circuit and to incorporate it into an apparatus, by making one surface of a thin dielectric whose dielectric constant is large adhere to one surface of n type or p type silicon by use of a nonconductive adhesive agent, and forming a potential sensor. CONSTITUTION:Electrodes 12, 13 are provided on each one surface of a thin dielectric 10 whose dielectric constant is large, and n type or p type silicon 11, and each surface of the opposite side of the surfaces on which said electrodes 12, 13 have been provided is made to adhere by a nonconductive adhesive agent. Also, on 2 parallel sides of the silicon 11, electrodes 14, 15 are provided. To said electrode 12, voltage to be measured is applied, and the electrode 13 is grounded. Also, a thermistor 16 for compensating temperature dependability of the silicon 11 is connected to the electrode 14, and constant voltage V is applied to the electrode 15. In this way, when constant voltage is applied to the electrodes 14, 15, a current is varied in accordance with magnitude of the voltage to be measured, and by a variation of this current, the voltage to be measured is measured.