JPS57196462A - Sample-image displaying device - Google Patents

Sample-image displaying device

Info

Publication number
JPS57196462A
JPS57196462A JP8143681A JP8143681A JPS57196462A JP S57196462 A JPS57196462 A JP S57196462A JP 8143681 A JP8143681 A JP 8143681A JP 8143681 A JP8143681 A JP 8143681A JP S57196462 A JPS57196462 A JP S57196462A
Authority
JP
Japan
Prior art keywords
electrons
signal
circuit
reflected
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8143681A
Other languages
Japanese (ja)
Inventor
Junichi Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP8143681A priority Critical patent/JPS57196462A/en
Publication of JPS57196462A publication Critical patent/JPS57196462A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To make an image with total contrast to be displayed in a scanning microscope by combining signals with different information so that they complement each other by comparing two selected information signals, and supplying two specified signals selectively according to the result of the said comparison into a displayer. CONSTITUTION:Detectors 9a, 9b, 9c and 9d used for detecting various kinds of information sent from a sample 4 are installed around the sample 4. When the same reflected- electrons signal and the same secondary-electrons signal are supplied to both a comparing circuit 11 and a selecting circuit 12, a switching signal is sent from the circuit 11 when the intensity of the reflected-electrons signal is larger than that of the secondary-electrons signal, and controls the circuit 12 so as to introduce an image signal based on reflected electrons into a cathode-ray tube 7. In contrast, when the intensity of the secondary-electrons signal is larger than that of the reflected-electrons signal, any signal is not produced from the circuit 11, and the circuit 12 sends an image signal based on secondary electrons into the cathode-ray tube 7. As the result, an image displayed on the tube 7 becomes the combination of signals, wich complement each other and have different informations based on reflected electrons and secondary electrons.
JP8143681A 1981-05-28 1981-05-28 Sample-image displaying device Pending JPS57196462A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8143681A JPS57196462A (en) 1981-05-28 1981-05-28 Sample-image displaying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8143681A JPS57196462A (en) 1981-05-28 1981-05-28 Sample-image displaying device

Publications (1)

Publication Number Publication Date
JPS57196462A true JPS57196462A (en) 1982-12-02

Family

ID=13746335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8143681A Pending JPS57196462A (en) 1981-05-28 1981-05-28 Sample-image displaying device

Country Status (1)

Country Link
JP (1) JPS57196462A (en)

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