JPS57194054U - - Google Patents
Info
- Publication number
- JPS57194054U JPS57194054U JP8220581U JP8220581U JPS57194054U JP S57194054 U JPS57194054 U JP S57194054U JP 8220581 U JP8220581 U JP 8220581U JP 8220581 U JP8220581 U JP 8220581U JP S57194054 U JPS57194054 U JP S57194054U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Measuring Cells (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8220581U JPS57194054U (ja) | 1981-06-05 | 1981-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8220581U JPS57194054U (ja) | 1981-06-05 | 1981-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57194054U true JPS57194054U (ja) | 1982-12-09 |
Family
ID=29877686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8220581U Pending JPS57194054U (ja) | 1981-06-05 | 1981-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57194054U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS637386A (ja) * | 1986-06-27 | 1988-01-13 | Sanyo Electric Co Ltd | ドライエツチングプロセスの評価方法 |
| JPS63229824A (ja) * | 1987-03-19 | 1988-09-26 | Tokyo Electron Ltd | ベ−キング装置 |
-
1981
- 1981-06-05 JP JP8220581U patent/JPS57194054U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS637386A (ja) * | 1986-06-27 | 1988-01-13 | Sanyo Electric Co Ltd | ドライエツチングプロセスの評価方法 |
| JPS63229824A (ja) * | 1987-03-19 | 1988-09-26 | Tokyo Electron Ltd | ベ−キング装置 |