JPS57194053U - - Google Patents
Info
- Publication number
- JPS57194053U JPS57194053U JP8220481U JP8220481U JPS57194053U JP S57194053 U JPS57194053 U JP S57194053U JP 8220481 U JP8220481 U JP 8220481U JP 8220481 U JP8220481 U JP 8220481U JP S57194053 U JPS57194053 U JP S57194053U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Optical Measuring Cells (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8220481U JPS57194053U (ja) | 1981-06-05 | 1981-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8220481U JPS57194053U (ja) | 1981-06-05 | 1981-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57194053U true JPS57194053U (ja) | 1982-12-09 |
Family
ID=29877685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8220481U Pending JPS57194053U (ja) | 1981-06-05 | 1981-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57194053U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63229824A (ja) * | 1987-03-19 | 1988-09-26 | Tokyo Electron Ltd | ベ−キング装置 |
| JPH11251298A (ja) * | 1998-03-02 | 1999-09-17 | Nec Kyushu Ltd | ドライエッチング装置とその起動方法 |
-
1981
- 1981-06-05 JP JP8220481U patent/JPS57194053U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63229824A (ja) * | 1987-03-19 | 1988-09-26 | Tokyo Electron Ltd | ベ−キング装置 |
| JPH11251298A (ja) * | 1998-03-02 | 1999-09-17 | Nec Kyushu Ltd | ドライエッチング装置とその起動方法 |