JPS57190214A - Optical sensor device - Google Patents

Optical sensor device

Info

Publication number
JPS57190214A
JPS57190214A JP56075883A JP7588381A JPS57190214A JP S57190214 A JPS57190214 A JP S57190214A JP 56075883 A JP56075883 A JP 56075883A JP 7588381 A JP7588381 A JP 7588381A JP S57190214 A JPS57190214 A JP S57190214A
Authority
JP
Japan
Prior art keywords
resonator
optical fiber
physical quantity
light
erot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56075883A
Other languages
Japanese (ja)
Other versions
JPH0232561B2 (en
Inventor
Akiya Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56075883A priority Critical patent/JPS57190214A/en
Publication of JPS57190214A publication Critical patent/JPS57190214A/en
Publication of JPH0232561B2 publication Critical patent/JPH0232561B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres

Abstract

PURPOSE:To detect a physical quantity highly accurately at a high SN ratio by introducing laser light whose wavelength is swept to a Fabry-P erot resonator wherein resonating waveform characteristics are changed in response to the physical quantity through a single mode optical fiber, and detecting the resonating output. CONSTITUTION:The single mode optical fiber 13 is coupled into a tube body 17 and fixed. Dielectric multiple layer films are evaporated on the surface of a thin plate 18 which is fixed to an opening part and the end surface of the optical fiber 13 and a light reflecting mirror is formed. Thus the Fabry P erot resonator 14 is constituted. The hollow space in the tube body 17 is communicated to the outside through a small hole 19. Therefore the thin plate 18 vibrates in the direction of an arrow in response to an external pressure P. When the laser light which is swept over a wavelength range is introduced to the resonator 14 from a laser oscillator 11 through the optical fiber 13, the resonator 14 is resonated at the wavelength corresponding to the conditions of the resonator 14. The light is inputted to the laser oscillator 11, and the decrease in the oscillating outputs is detected by a light detector 12. Therefore the physical quantity is detected highly accurately at a high SN ratio.
JP56075883A 1981-05-20 1981-05-20 Optical sensor device Granted JPS57190214A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56075883A JPS57190214A (en) 1981-05-20 1981-05-20 Optical sensor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56075883A JPS57190214A (en) 1981-05-20 1981-05-20 Optical sensor device

Publications (2)

Publication Number Publication Date
JPS57190214A true JPS57190214A (en) 1982-11-22
JPH0232561B2 JPH0232561B2 (en) 1990-07-20

Family

ID=13589125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56075883A Granted JPS57190214A (en) 1981-05-20 1981-05-20 Optical sensor device

Country Status (1)

Country Link
JP (1) JPS57190214A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0228677A2 (en) * 1985-12-30 1987-07-15 Metricor, Inc. Optical pressure-sensing system
EP0300640A2 (en) * 1987-07-15 1989-01-25 AT&T Corp. Optical communication systems using Fabry-Perot cavities
EP0423903A2 (en) * 1984-07-06 1991-04-24 Photonetics, Inc. Spectral modulation sensor having an optically resonant structure and optical measuring devices using the same
WO1991019965A1 (en) * 1990-06-13 1991-12-26 Dynisco Geräte Gmbh Fibre optic pressure sensor
JP2001212684A (en) * 2000-02-02 2001-08-07 Shibuya Kogyo Co Ltd Via-hole processing method and its apparatus
DE102010018322B3 (en) * 2010-04-27 2011-04-07 Laib, Thorsten, Dr. Laser optical sensor for detecting concentration of substances in e.g. gas in chemical laboratory, has external plate coated with sensitive layer that reacts with analytes so that optical thickness of layer is changed by reaction
CN103115698A (en) * 2013-03-06 2013-05-22 东北大学 Optical fiber Fabry-Perot (FP) temperature sensor filled with alcohol
JP2020058481A (en) * 2018-10-05 2020-04-16 国立大学法人 岡山大学 Thermotherapy instrument
WO2022038731A1 (en) * 2020-08-20 2022-02-24 日本電信電話株式会社 Temperature measurement device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4817049B2 (en) * 2006-01-20 2011-11-16 日本電気株式会社 Temperature sensor and temperature sensor system

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0423903A2 (en) * 1984-07-06 1991-04-24 Photonetics, Inc. Spectral modulation sensor having an optically resonant structure and optical measuring devices using the same
EP0228677A2 (en) * 1985-12-30 1987-07-15 Metricor, Inc. Optical pressure-sensing system
EP0300640A2 (en) * 1987-07-15 1989-01-25 AT&T Corp. Optical communication systems using Fabry-Perot cavities
WO1991019965A1 (en) * 1990-06-13 1991-12-26 Dynisco Geräte Gmbh Fibre optic pressure sensor
JP2001212684A (en) * 2000-02-02 2001-08-07 Shibuya Kogyo Co Ltd Via-hole processing method and its apparatus
DE102010018322B3 (en) * 2010-04-27 2011-04-07 Laib, Thorsten, Dr. Laser optical sensor for detecting concentration of substances in e.g. gas in chemical laboratory, has external plate coated with sensitive layer that reacts with analytes so that optical thickness of layer is changed by reaction
CN103115698A (en) * 2013-03-06 2013-05-22 东北大学 Optical fiber Fabry-Perot (FP) temperature sensor filled with alcohol
JP2020058481A (en) * 2018-10-05 2020-04-16 国立大学法人 岡山大学 Thermotherapy instrument
WO2022038731A1 (en) * 2020-08-20 2022-02-24 日本電信電話株式会社 Temperature measurement device

Also Published As

Publication number Publication date
JPH0232561B2 (en) 1990-07-20

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