JPS571879B2 - - Google Patents
Info
- Publication number
- JPS571879B2 JPS571879B2 JP2166075A JP2166075A JPS571879B2 JP S571879 B2 JPS571879 B2 JP S571879B2 JP 2166075 A JP2166075 A JP 2166075A JP 2166075 A JP2166075 A JP 2166075A JP S571879 B2 JPS571879 B2 JP S571879B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- X-Ray Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50021660A JPS5197393A (en) | 1975-02-21 | 1975-02-21 | x senshutsuryokuno seigyohoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50021660A JPS5197393A (en) | 1975-02-21 | 1975-02-21 | x senshutsuryokuno seigyohoho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5197393A JPS5197393A (en) | 1976-08-26 |
| JPS571879B2 true JPS571879B2 (cs) | 1982-01-13 |
Family
ID=12061186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50021660A Granted JPS5197393A (en) | 1975-02-21 | 1975-02-21 | x senshutsuryokuno seigyohoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5197393A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180110111A (ko) | 2016-03-25 | 2018-10-08 | 제이엑스금속주식회사 | Ti-Nb 합금 스퍼터링 타깃 및 그 제조 방법 |
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1975
- 1975-02-21 JP JP50021660A patent/JPS5197393A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180110111A (ko) | 2016-03-25 | 2018-10-08 | 제이엑스금속주식회사 | Ti-Nb 합금 스퍼터링 타깃 및 그 제조 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5197393A (en) | 1976-08-26 |