JPS57187967U - - Google Patents

Info

Publication number
JPS57187967U
JPS57187967U JP7574381U JP7574381U JPS57187967U JP S57187967 U JPS57187967 U JP S57187967U JP 7574381 U JP7574381 U JP 7574381U JP 7574381 U JP7574381 U JP 7574381U JP S57187967 U JPS57187967 U JP S57187967U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7574381U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7574381U priority Critical patent/JPS57187967U/ja
Publication of JPS57187967U publication Critical patent/JPS57187967U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
JP7574381U 1981-05-27 1981-05-27 Pending JPS57187967U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7574381U JPS57187967U (en) 1981-05-27 1981-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7574381U JPS57187967U (en) 1981-05-27 1981-05-27

Publications (1)

Publication Number Publication Date
JPS57187967U true JPS57187967U (en) 1982-11-29

Family

ID=29871465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7574381U Pending JPS57187967U (en) 1981-05-27 1981-05-27

Country Status (1)

Country Link
JP (1) JPS57187967U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010230076A (en) * 2009-03-27 2010-10-14 Tokyo Electron Ltd Gate valve device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010230076A (en) * 2009-03-27 2010-10-14 Tokyo Electron Ltd Gate valve device

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