JPS57187942A - Semiconductor processor associated with black radiation generation source becoming constant and planar energy bundle - Google Patents

Semiconductor processor associated with black radiation generation source becoming constant and planar energy bundle

Info

Publication number
JPS57187942A
JPS57187942A JP57065561A JP6556182A JPS57187942A JP S57187942 A JPS57187942 A JP S57187942A JP 57065561 A JP57065561 A JP 57065561A JP 6556182 A JP6556182 A JP 6556182A JP S57187942 A JPS57187942 A JP S57187942A
Authority
JP
Japan
Prior art keywords
generation source
processor associated
radiation generation
semiconductor processor
energy bundle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57065561A
Other languages
English (en)
Japanese (ja)
Inventor
Sutefuan Muuka Richiyaado
Jiyosefu Raaso Kaaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of JPS57187942A publication Critical patent/JPS57187942A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B1/00—Single-crystal growth directly from the solid state
    • C30B1/02—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P34/00—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices
    • H10P34/40—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation
    • H10P34/42—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation with electromagnetic radiation, e.g. laser annealing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Furnace Details (AREA)
  • Recrystallisation Techniques (AREA)
  • Photovoltaic Devices (AREA)
JP57065561A 1981-05-12 1982-04-21 Semiconductor processor associated with black radiation generation source becoming constant and planar energy bundle Pending JPS57187942A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/262,838 US4417347A (en) 1981-05-12 1981-05-12 Semiconductor processor incorporating blackbody radiation source with constant planar energy flux

Publications (1)

Publication Number Publication Date
JPS57187942A true JPS57187942A (en) 1982-11-18

Family

ID=22999281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57065561A Pending JPS57187942A (en) 1981-05-12 1982-04-21 Semiconductor processor associated with black radiation generation source becoming constant and planar energy bundle

Country Status (7)

Country Link
US (1) US4417347A (enExample)
JP (1) JPS57187942A (enExample)
CH (1) CH671312A5 (enExample)
DE (1) DE3216850A1 (enExample)
FR (1) FR2506073B1 (enExample)
GB (1) GB2098437B (enExample)
NL (1) NL8201958A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6072227A (ja) * 1983-08-29 1985-04-24 バリアン・アソシエイツ・インコ−ポレイテツド 半導体ウエフア中へド−パントを高温ドライブイン拡散する方法

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474831A (en) * 1982-08-27 1984-10-02 Varian Associates, Inc. Method for reflow of phosphosilicate glass
US4481406A (en) * 1983-01-21 1984-11-06 Varian Associates, Inc. Heater assembly for thermal processing of a semiconductor wafer in a vacuum chamber
DE3305934A1 (de) * 1983-02-21 1984-08-23 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur temperaturbehandlung von substraten, insbesondere von halbleiterkristallscheiben
US4522845A (en) * 1983-06-20 1985-06-11 Varian Associates, Inc. Process for producing a layer of a metal silicide by applying multichromatic radiation
US4661177A (en) * 1985-10-08 1987-04-28 Varian Associates, Inc. Method for doping semiconductor wafers by rapid thermal processing of solid planar diffusion sources
GB8527062D0 (en) * 1985-11-02 1985-12-04 Plessey Co Plc Mos transistor manufacture
US4717588A (en) * 1985-12-23 1988-01-05 Motorola Inc. Metal redistribution by rapid thermal processing
US4978567A (en) * 1988-03-31 1990-12-18 Materials Technology Corporation, Subsidiary Of The Carbon/Graphite Group, Inc. Wafer holding fixture for chemical reaction processes in rapid thermal processing equipment and method for making same
US5126533A (en) * 1990-03-19 1992-06-30 Conductus, Inc. Substrate heater utilizing protective heat sinking means
US5365875A (en) * 1991-03-25 1994-11-22 Fuji Xerox Co., Ltd. Semiconductor element manufacturing method
TW291589B (enExample) * 1995-03-30 1996-11-21 Ftl Co Ltd
US6002109A (en) * 1995-07-10 1999-12-14 Mattson Technology, Inc. System and method for thermal processing of a semiconductor substrate
US6133550A (en) * 1996-03-22 2000-10-17 Sandia Corporation Method and apparatus for thermal processing of semiconductor substrates
US6198074B1 (en) 1996-09-06 2001-03-06 Mattson Technology, Inc. System and method for rapid thermal processing with transitional heater
US7855088B2 (en) * 2006-12-21 2010-12-21 Texas Instruments Incorporated Method for manufacturing integrated circuits by guardbanding die regions

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS497796A (enExample) * 1972-05-11 1974-01-23
JPS55127034A (en) * 1979-03-16 1980-10-01 Varian Associates Device for mechanically urging semiconductor wafer to soft thermoconductive surface

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3138697A (en) * 1962-10-16 1964-06-23 Barnes Eng Co Black body radiation sources
US3263016A (en) * 1963-10-30 1966-07-26 Branstetter James Robert Black-body furnace
DE1936245A1 (de) * 1969-07-16 1971-02-04 Beckman Instruments Gmbh Infrarotstrahleranordnung
US3901183A (en) * 1973-06-12 1975-08-26 Extrion Corp Wafer treatment apparatus
US4047496A (en) * 1974-05-31 1977-09-13 Applied Materials, Inc. Epitaxial radiation heated reactor
US3954191A (en) * 1974-11-18 1976-05-04 Extrion Corporation Isolation lock for workpieces
US4081313A (en) * 1975-01-24 1978-03-28 Applied Materials, Inc. Process for preparing semiconductor wafers with substantially no crystallographic slip
US4097226A (en) * 1976-10-26 1978-06-27 General Electric Company Furnace for practising temperature gradient zone melting
US4101759A (en) * 1976-10-26 1978-07-18 General Electric Company Semiconductor body heater
US4311427A (en) * 1979-12-21 1982-01-19 Varian Associates, Inc. Wafer transfer system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS497796A (enExample) * 1972-05-11 1974-01-23
JPS55127034A (en) * 1979-03-16 1980-10-01 Varian Associates Device for mechanically urging semiconductor wafer to soft thermoconductive surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6072227A (ja) * 1983-08-29 1985-04-24 バリアン・アソシエイツ・インコ−ポレイテツド 半導体ウエフア中へド−パントを高温ドライブイン拡散する方法

Also Published As

Publication number Publication date
GB2098437A (en) 1982-11-17
US4417347A (en) 1983-11-22
DE3216850C2 (enExample) 1992-05-21
CH671312A5 (enExample) 1989-08-15
FR2506073B1 (fr) 1986-12-05
DE3216850A1 (de) 1982-12-02
GB2098437B (en) 1985-06-12
NL8201958A (nl) 1982-12-01
FR2506073A1 (fr) 1982-11-19

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