JPS57185964A - Production of mo plate having ultraflatness - Google Patents
Production of mo plate having ultraflatnessInfo
- Publication number
- JPS57185964A JPS57185964A JP6815481A JP6815481A JPS57185964A JP S57185964 A JPS57185964 A JP S57185964A JP 6815481 A JP6815481 A JP 6815481A JP 6815481 A JP6815481 A JP 6815481A JP S57185964 A JPS57185964 A JP S57185964A
- Authority
- JP
- Japan
- Prior art keywords
- plates
- flatness
- cleaned
- planes
- ultraflatness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To produce Mo plates having ultraflatness used for X-ray tomographic devices by subjecting the cleaned Mo plates to a heat treatment in a reducing atmosphere while sandwiching these by pressure with heat resistant rigid plates having flatness higher than the desired flatness.
CONSTITUTION: Mo plates rolled to a desired thickness are blanked to prescribed shapes, and further burrs, etc. are removed by machining. These plates are cleaned with a detergent such as an aq. powder soap soln. to remove the foreign matter, oils, etc. stuck on their planes, after which they are dried. The cleaning is accomplished thoroughly so as not to leave foreign matter of about 5μ on the planes. Plural sheets of the cleaned Mo plates 6 are sandwiched by pressure by means of Mo blocks 4, 5 having working planes of about ≤20μ flatness, and these are contained in a boat 8 consisting of an Mo plate. While these are pressurized by weights 7 consisting of W, the plates are subjected to a heat treatment for at least about 15W60min at 980W1,070°C in an H2 furnace, whereby the Mo plates having about 30μ flatness are obtained.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6815481A JPS57185964A (en) | 1981-05-08 | 1981-05-08 | Production of mo plate having ultraflatness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6815481A JPS57185964A (en) | 1981-05-08 | 1981-05-08 | Production of mo plate having ultraflatness |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57185964A true JPS57185964A (en) | 1982-11-16 |
Family
ID=13365535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6815481A Pending JPS57185964A (en) | 1981-05-08 | 1981-05-08 | Production of mo plate having ultraflatness |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57185964A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6099431A (en) * | 1983-11-04 | 1985-06-03 | Sumitomo Light Metal Ind Ltd | Method and apparatus for correcting strain of metallic disk |
JPS63286225A (en) * | 1987-05-19 | 1988-11-22 | Furukawa Alum Co Ltd | Mirror working method for metal plate |
JPH0199720A (en) * | 1987-10-09 | 1989-04-18 | Tokyo Tungsten Co Ltd | Jig for correcting flatness of thin sheet |
US6827904B2 (en) | 2000-03-31 | 2004-12-07 | Sysmex Corporation | Liquid dispensing apparatus and an automatic analyzing apparatus using the same |
US7837940B2 (en) | 2006-10-10 | 2010-11-23 | Sysmex Corporation | Analyzer, reagent-containing assembly, and reagent suctioning method |
US11360047B2 (en) | 2017-07-31 | 2022-06-14 | Hitachi High-Technologies Corporation | Capillary electrophoresis device |
-
1981
- 1981-05-08 JP JP6815481A patent/JPS57185964A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6099431A (en) * | 1983-11-04 | 1985-06-03 | Sumitomo Light Metal Ind Ltd | Method and apparatus for correcting strain of metallic disk |
JPS63286225A (en) * | 1987-05-19 | 1988-11-22 | Furukawa Alum Co Ltd | Mirror working method for metal plate |
JPH0199720A (en) * | 1987-10-09 | 1989-04-18 | Tokyo Tungsten Co Ltd | Jig for correcting flatness of thin sheet |
US6827904B2 (en) | 2000-03-31 | 2004-12-07 | Sysmex Corporation | Liquid dispensing apparatus and an automatic analyzing apparatus using the same |
US7837940B2 (en) | 2006-10-10 | 2010-11-23 | Sysmex Corporation | Analyzer, reagent-containing assembly, and reagent suctioning method |
US11360047B2 (en) | 2017-07-31 | 2022-06-14 | Hitachi High-Technologies Corporation | Capillary electrophoresis device |
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