JPS57185964A - Production of mo plate having ultraflatness - Google Patents

Production of mo plate having ultraflatness

Info

Publication number
JPS57185964A
JPS57185964A JP6815481A JP6815481A JPS57185964A JP S57185964 A JPS57185964 A JP S57185964A JP 6815481 A JP6815481 A JP 6815481A JP 6815481 A JP6815481 A JP 6815481A JP S57185964 A JPS57185964 A JP S57185964A
Authority
JP
Japan
Prior art keywords
plates
flatness
cleaned
planes
ultraflatness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6815481A
Other languages
Japanese (ja)
Inventor
Hiroyuki Saito
Yoshio Fukuhara
Hideo Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6815481A priority Critical patent/JPS57185964A/en
Publication of JPS57185964A publication Critical patent/JPS57185964A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To produce Mo plates having ultraflatness used for X-ray tomographic devices by subjecting the cleaned Mo plates to a heat treatment in a reducing atmosphere while sandwiching these by pressure with heat resistant rigid plates having flatness higher than the desired flatness.
CONSTITUTION: Mo plates rolled to a desired thickness are blanked to prescribed shapes, and further burrs, etc. are removed by machining. These plates are cleaned with a detergent such as an aq. powder soap soln. to remove the foreign matter, oils, etc. stuck on their planes, after which they are dried. The cleaning is accomplished thoroughly so as not to leave foreign matter of about 5μ on the planes. Plural sheets of the cleaned Mo plates 6 are sandwiched by pressure by means of Mo blocks 4, 5 having working planes of about ≤20μ flatness, and these are contained in a boat 8 consisting of an Mo plate. While these are pressurized by weights 7 consisting of W, the plates are subjected to a heat treatment for at least about 15W60min at 980W1,070°C in an H2 furnace, whereby the Mo plates having about 30μ flatness are obtained.
COPYRIGHT: (C)1982,JPO&Japio
JP6815481A 1981-05-08 1981-05-08 Production of mo plate having ultraflatness Pending JPS57185964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6815481A JPS57185964A (en) 1981-05-08 1981-05-08 Production of mo plate having ultraflatness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6815481A JPS57185964A (en) 1981-05-08 1981-05-08 Production of mo plate having ultraflatness

Publications (1)

Publication Number Publication Date
JPS57185964A true JPS57185964A (en) 1982-11-16

Family

ID=13365535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6815481A Pending JPS57185964A (en) 1981-05-08 1981-05-08 Production of mo plate having ultraflatness

Country Status (1)

Country Link
JP (1) JPS57185964A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6099431A (en) * 1983-11-04 1985-06-03 Sumitomo Light Metal Ind Ltd Method and apparatus for correcting strain of metallic disk
JPS63286225A (en) * 1987-05-19 1988-11-22 Furukawa Alum Co Ltd Mirror working method for metal plate
JPH0199720A (en) * 1987-10-09 1989-04-18 Tokyo Tungsten Co Ltd Jig for correcting flatness of thin sheet
US6827904B2 (en) 2000-03-31 2004-12-07 Sysmex Corporation Liquid dispensing apparatus and an automatic analyzing apparatus using the same
US7837940B2 (en) 2006-10-10 2010-11-23 Sysmex Corporation Analyzer, reagent-containing assembly, and reagent suctioning method
US11360047B2 (en) 2017-07-31 2022-06-14 Hitachi High-Technologies Corporation Capillary electrophoresis device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6099431A (en) * 1983-11-04 1985-06-03 Sumitomo Light Metal Ind Ltd Method and apparatus for correcting strain of metallic disk
JPS63286225A (en) * 1987-05-19 1988-11-22 Furukawa Alum Co Ltd Mirror working method for metal plate
JPH0199720A (en) * 1987-10-09 1989-04-18 Tokyo Tungsten Co Ltd Jig for correcting flatness of thin sheet
US6827904B2 (en) 2000-03-31 2004-12-07 Sysmex Corporation Liquid dispensing apparatus and an automatic analyzing apparatus using the same
US7837940B2 (en) 2006-10-10 2010-11-23 Sysmex Corporation Analyzer, reagent-containing assembly, and reagent suctioning method
US11360047B2 (en) 2017-07-31 2022-06-14 Hitachi High-Technologies Corporation Capillary electrophoresis device

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