JPS57183336U - - Google Patents
Info
- Publication number
- JPS57183336U JPS57183336U JP7145681U JP7145681U JPS57183336U JP S57183336 U JPS57183336 U JP S57183336U JP 7145681 U JP7145681 U JP 7145681U JP 7145681 U JP7145681 U JP 7145681U JP S57183336 U JPS57183336 U JP S57183336U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Building Environments (AREA)
- Floor Finish (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7145681U JPS6117151Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-05-19 | 1981-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7145681U JPS6117151Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-05-19 | 1981-05-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57183336U true JPS57183336U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-11-20 |
| JPS6117151Y2 JPS6117151Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-26 |
Family
ID=29867249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7145681U Expired JPS6117151Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-05-19 | 1981-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6117151Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03128147U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1990-04-09 | 1991-12-24 | ||
| JP2010222822A (ja) * | 2009-03-23 | 2010-10-07 | Dooei Gaiso Kk | 天井用目地装置 |
| JP2017133276A (ja) * | 2016-01-29 | 2017-08-03 | 理研軽金属工業株式会社 | エキスパンションジョイントカバー装置 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5073902B2 (ja) | 1999-11-02 | 2012-11-14 | 東京エレクトロン株式会社 | 多数のワークピースを超臨界処理する方法及び装置 |
| US6748960B1 (en) | 1999-11-02 | 2004-06-15 | Tokyo Electron Limited | Apparatus for supercritical processing of multiple workpieces |
| US7186093B2 (en) | 2004-10-05 | 2007-03-06 | Tokyo Electron Limited | Method and apparatus for cooling motor bearings of a high pressure pump |
| US7250374B2 (en) | 2004-06-30 | 2007-07-31 | Tokyo Electron Limited | System and method for processing a substrate using supercritical carbon dioxide processing |
| US7307019B2 (en) | 2004-09-29 | 2007-12-11 | Tokyo Electron Limited | Method for supercritical carbon dioxide processing of fluoro-carbon films |
| US7491036B2 (en) | 2004-11-12 | 2009-02-17 | Tokyo Electron Limited | Method and system for cooling a pump |
| US7140393B2 (en) | 2004-12-22 | 2006-11-28 | Tokyo Electron Limited | Non-contact shuttle valve for flow diversion in high pressure systems |
| US7434590B2 (en) | 2004-12-22 | 2008-10-14 | Tokyo Electron Limited | Method and apparatus for clamping a substrate in a high pressure processing system |
| US7291565B2 (en) | 2005-02-15 | 2007-11-06 | Tokyo Electron Limited | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid |
| US7380984B2 (en) | 2005-03-28 | 2008-06-03 | Tokyo Electron Limited | Process flow thermocouple |
| US7494107B2 (en) | 2005-03-30 | 2009-02-24 | Supercritical Systems, Inc. | Gate valve for plus-atmospheric pressure semiconductor process vessels |
| US7524383B2 (en) | 2005-05-25 | 2009-04-28 | Tokyo Electron Limited | Method and system for passivating a processing chamber |
-
1981
- 1981-05-19 JP JP7145681U patent/JPS6117151Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03128147U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1990-04-09 | 1991-12-24 | ||
| JP2010222822A (ja) * | 2009-03-23 | 2010-10-07 | Dooei Gaiso Kk | 天井用目地装置 |
| JP2017133276A (ja) * | 2016-01-29 | 2017-08-03 | 理研軽金属工業株式会社 | エキスパンションジョイントカバー装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6117151Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-26 |