JPS5717845A - Ion counting method of ion microanalyzer - Google Patents

Ion counting method of ion microanalyzer

Info

Publication number
JPS5717845A
JPS5717845A JP9363280A JP9363280A JPS5717845A JP S5717845 A JPS5717845 A JP S5717845A JP 9363280 A JP9363280 A JP 9363280A JP 9363280 A JP9363280 A JP 9363280A JP S5717845 A JPS5717845 A JP S5717845A
Authority
JP
Japan
Prior art keywords
pulse
generated
gate
ion
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9363280A
Other languages
Japanese (ja)
Inventor
Nobuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9363280A priority Critical patent/JPS5717845A/en
Publication of JPS5717845A publication Critical patent/JPS5717845A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To remove the information generated at the tip part of a scanning area and to improve resolution of depth direction, by synchronizing scanning control of the primary ion beam with gate time control on a pulse counter using as a measuring method of the secondary ion. CONSTITUTION:A sweep signal is applied to deflection electrodes 4X, 4Y of the primary ion by sweep signal generators 12X, 12Y. Y direction pulse (b) and X direction pulse (d) only turning to ON for limited time by a preliminarily set threshold voltage, are generated by sweep signals (a) and (c) generated by the generators 12X, 12Y in control pulse generators 13X, 13Y. A gate pulse (e) is prepared for this pulse (d) through an adder 14 and also, is introduced into a gate control signal generating circuit 15 and then, a reset pulse (f) is generated for clearing a counter 11. Further, the pulse (d) is counted for a constant number of the pulses and a gate off pluse (g) is generated. The secondary ion is measured only ON state of the pulse (e) during this gate time.
JP9363280A 1980-07-08 1980-07-08 Ion counting method of ion microanalyzer Pending JPS5717845A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9363280A JPS5717845A (en) 1980-07-08 1980-07-08 Ion counting method of ion microanalyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9363280A JPS5717845A (en) 1980-07-08 1980-07-08 Ion counting method of ion microanalyzer

Publications (1)

Publication Number Publication Date
JPS5717845A true JPS5717845A (en) 1982-01-29

Family

ID=14087704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9363280A Pending JPS5717845A (en) 1980-07-08 1980-07-08 Ion counting method of ion microanalyzer

Country Status (1)

Country Link
JP (1) JPS5717845A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6445050A (en) * 1987-08-12 1989-02-17 Hitachi Ltd Mass spectrometer for secondary ion

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6445050A (en) * 1987-08-12 1989-02-17 Hitachi Ltd Mass spectrometer for secondary ion

Similar Documents

Publication Publication Date Title
JPS5717845A (en) Ion counting method of ion microanalyzer
JPS57173562A (en) Ignition device
ATE112062T1 (en) METHOD AND ARRANGEMENT FOR MEASUREMENT OF THE STATE AND/OR HISTORY OF A SIGNAL.
JPS5714983A (en) Control device for starting position of picture recording
CA1050112A (en) Ignition analyzer time base
JPS5583803A (en) Dimension measuring unit
SU1198766A1 (en) Device for determining probabilistic characteristics of random variable
JPS5590872A (en) Detecting-indication system for scanning sonar
SU702504A1 (en) Pulse selector
JPS5512473A (en) Crt display device
SU918860A1 (en) Electron beam oscilloscope
GB1502948A (en) Detection of faults in a predetermined area of a surface
SU671974A1 (en) Method of dimensional electrochemical working
SU879821A1 (en) Device fr measuring scanning non-linearity of cathode -ray tube
SU714544A1 (en) Raster electronic microscope
JPS53119602A (en) Data transmission system
SU642219A1 (en) Device for measuring type lever impact energy in typewriter
SU134286A1 (en) The method of recording the characteristic moments of modulation of telegraph signals on the screen of a cathode ray tube
SU563651A1 (en) Apparatus for measuring characteristics of millimicrosecond pulses
SU485472A1 (en) Multi-channel analyzer of emission area distribution functions
SU1309054A1 (en) Device for determining initial moments of stochastic variable
JPS542056A (en) Scanning type electron microscope
US3153141A (en) Recorder chart analyzer
SU892311A1 (en) Cathode ray oscilloscope with automatic setting of picture vertical dimension
JPS55115333A (en) Detecting device of location detection mark signal used for electron beam exposure