SU714544A1 - Raster electronic microscope - Google Patents

Description

(54) RASTER EYECTRONIC MICROSCOPE

the rest of the rest of the device ;; This is also a low information content of the image.

The purpose of the present invention is to increase the information content of the image; Nin

For this purpose, the device contains a delay line and a phase detector, whose inputs are connected to the output of the electron detector, another through the delay line to the output of the pulse generator, and the output to the input of the video monitor.

Such an embodiment of the device makes it possible to display, on the entire screen area of the video control device, an information about the topography of each zlemeite of the surface of the investigated area of the object contained in a solid angle described by it around each such element. This is accomplished by registering a temporary imbalance between the signals c, of any element and is traceable; a portion of the object obtained as a result of the impact of a pulsed electron probe on it, when its angle of incidence on this element changes and the reference signal from the pulse generator. Thus, on the VYU screen, a (multi-view) pseudo-holographic image of the investigated area of the object is obtained, which results are higher than the information content of the video image: NYA

The ria drawing shows a microscope where it is shown: electrically operated gun 1, control. Electron Gun Electrode 2, Probe Formation System 3Lolectronybg, Deviation System 4, Sweep Generator 5, Probe Inclination System B with respect to the Object, Object 7, Detector 8, Electron, Phase Detector 9, Litz 10 Delay, 11 Pulses, see control device 12.

The microscope works as follows., -.-., ...--, - ..

.. - Electron gun 1 emits. electron beam, which is formed by a system of 3 e small diameter electronic probe. The generated electronic probe is gated by applying signals from the generator 11 of the pulses to the control electrode 2 of the electron gun 1. As a result of the gating, the electronic probe acts on the object during. vryo 1 her determined duration. impulse from the generator 11. The signal from any point of the object 7, which at this moment is affected by the .v. electron probe in a period of time, -p-the duration of a single impulse of the generator-11, the rest Iytryyruyet the detector of 8 electrons and enters

the input of the phase detector 9 simultaneously with the reference signal from the pulse generator 11, which is preliminarily passed through a delay line 10, designed to compensate for the time of flight of electrons from the electron gun 1 to the object 7. The phase detector 9 produces a signal, the value of which is proportional to the time imbalance between the object signal and reference signal

Ut of the generator 11 pulses, the magnitudes of the indicated unbalance is determined by the topography of the object surface. A signal from the output of the phase detector 9 is recorded on the screen of the video monitor device. 12

The signal from the pulse generator 11 is also fed to one of the inputs of the generator 5 sweeps. When each pulse arrives, the 5 sweep generator outputs a signal to the input of the probe tilting system b with respect to the object, which changes the angle of incidence of the probe to the object point to be examined, after which the operations are repeated.

The received signal is also recorded on the screen of the video monitor device 12, in a strictly defined place, since the operation of the probe tilt system 6 with respect to the object and

the scanning of the beam on the screen of the video monitoring device 12 is carried out synchronously.

Number of probe positions at which each point is examined

object 7, depends on the size of the counting device generator 5 sweeps. After the entire volume of the sweep generator 5 sweep device has been exhausted, the sweep generator 5 generates a signal and rejects the transition to the point of the studied area of the object 7, for which the whole process repeats. After passing the probe all points of the study area

Object 7 on the entire screen area of the control device 12 is recorded topography information. the surface of the investigated area of the object, containing with a solid angle described by the probe around each such element of the surfaces, i.e. a pseudo-hologram obtained by radio-technical method will be obtained on the screen. -With illumination

the resulting hologram with a laser beam on the screen produces a three-dimensional image of the object surface.

Claims (2)

1.Patent UK -№ 127,6364, cl. N 1 D, pub. 1972. 2. For Japan 49-29091, 0 кп. 99 C 31, published. 1974. LiJt & 1 M / 2