JPS5717830A - Semiconductor pressure sensor - Google Patents

Semiconductor pressure sensor

Info

Publication number
JPS5717830A
JPS5717830A JP7560981A JP7560981A JPS5717830A JP S5717830 A JPS5717830 A JP S5717830A JP 7560981 A JP7560981 A JP 7560981A JP 7560981 A JP7560981 A JP 7560981A JP S5717830 A JPS5717830 A JP S5717830A
Authority
JP
Japan
Prior art keywords
pressure sensor
semiconductor pressure
semiconductor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7560981A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241184B2 (de
Inventor
Furaimetsusaa Furitsutsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS5717830A publication Critical patent/JPS5717830A/ja
Publication of JPH0241184B2 publication Critical patent/JPH0241184B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP7560981A 1980-05-22 1981-05-19 Semiconductor pressure sensor Granted JPS5717830A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803019674 DE3019674A1 (de) 1980-05-22 1980-05-22 Halbleiter-sensor

Publications (2)

Publication Number Publication Date
JPS5717830A true JPS5717830A (en) 1982-01-29
JPH0241184B2 JPH0241184B2 (de) 1990-09-14

Family

ID=6103112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7560981A Granted JPS5717830A (en) 1980-05-22 1981-05-19 Semiconductor pressure sensor

Country Status (3)

Country Link
EP (1) EP0040795B1 (de)
JP (1) JPS5717830A (de)
DE (2) DE3019674A1 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210534A (ja) * 1982-06-01 1983-12-07 Citizen Watch Co Ltd 圧力検出装置
JPS6085344A (ja) * 1983-10-15 1985-05-14 Shimadzu Corp 小型圧力測定装置
US5381696A (en) * 1991-05-17 1995-01-17 Honda Giken Kogyo Kabushiki Kaisha Semiconductor stress sensor
JP2005291978A (ja) * 2004-04-01 2005-10-20 Hitachi Ltd 半導体センサ

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3920648A1 (de) * 1989-06-23 1991-01-03 Siemens Ag Verfahren und elektrische anordnung zur messsignalverarbeitung
FR2653197B1 (fr) * 1989-10-12 1991-12-27 Vulcanic Procede d'etancheification d'une extremite d'element de chauffage electrique et element etancheifie par ce procede.
FR2653271B1 (fr) * 1989-10-13 1994-06-10 Schlumberger Ind Sa Capteur a semi-conducteurs.
JP3009239B2 (ja) * 1991-04-02 2000-02-14 本田技研工業株式会社 半導体センサ
SG68002A1 (en) * 1997-11-25 1999-10-19 Inst Of Microelectronics Natio Cmos compatible integrated pressure sensor
DE102006061721B4 (de) * 2006-12-28 2016-12-29 Infineon Technologies Ag Kompensationsgrößen-Bereitstellungsschaltung, Spannungs-Kompensationsschaltung, spannungskompensierte Schaltung, Vorrichtung zur Bereitstellung einer Kompensationsgröße, Verfahren zum Bereitstellen einer Kompensationsgröße und Ring-Oszillator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5357731A (en) * 1976-11-04 1978-05-25 Fujitsu Ltd Voltage-contro-type oscillation circuit

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3345582A (en) * 1966-09-13 1967-10-03 Honeywell Inc Semiconductor condition responsive phase shift oscillators
US3624315A (en) * 1967-01-23 1971-11-30 Max E Broce Transducer apparatus and transducer amplifier system utilizing insulated gate semiconductor field effect devices
FR2074759A6 (de) * 1967-03-15 1971-10-08 Thomson Csf
US3931588A (en) * 1974-09-10 1976-01-06 Rca Corporation Voltage controlled oscillator utilizing field effect transistors
JPS53145457A (en) * 1977-05-24 1978-12-18 Toshiba Corp Variable frequency oscillator circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5357731A (en) * 1976-11-04 1978-05-25 Fujitsu Ltd Voltage-contro-type oscillation circuit

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210534A (ja) * 1982-06-01 1983-12-07 Citizen Watch Co Ltd 圧力検出装置
JPS6085344A (ja) * 1983-10-15 1985-05-14 Shimadzu Corp 小型圧力測定装置
JPH0544615B2 (de) * 1983-10-15 1993-07-06 Shimadzu Corp
US5381696A (en) * 1991-05-17 1995-01-17 Honda Giken Kogyo Kabushiki Kaisha Semiconductor stress sensor
JP2005291978A (ja) * 2004-04-01 2005-10-20 Hitachi Ltd 半導体センサ

Also Published As

Publication number Publication date
JPH0241184B2 (de) 1990-09-14
DE3176099D1 (en) 1987-05-14
EP0040795A3 (en) 1983-05-18
DE3019674A1 (de) 1981-11-26
EP0040795A2 (de) 1981-12-02
EP0040795B1 (de) 1987-04-08

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