JPS57174458A - Construction of vessel for evaporating source - Google Patents
Construction of vessel for evaporating sourceInfo
- Publication number
- JPS57174458A JPS57174458A JP5969281A JP5969281A JPS57174458A JP S57174458 A JPS57174458 A JP S57174458A JP 5969281 A JP5969281 A JP 5969281A JP 5969281 A JP5969281 A JP 5969281A JP S57174458 A JPS57174458 A JP S57174458A
- Authority
- JP
- Japan
- Prior art keywords
- steel strip
- plating
- length
- made equal
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010276 construction Methods 0.000 title abstract 2
- 238000001704 evaporation Methods 0.000 title abstract 2
- 229910000831 Steel Inorganic materials 0.000 abstract 6
- 238000007747 plating Methods 0.000 abstract 6
- 239000010959 steel Substances 0.000 abstract 6
- 239000000463 material Substances 0.000 abstract 2
- 238000005192 partition Methods 0.000 abstract 2
- 238000007740 vapor deposition Methods 0.000 abstract 2
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5969281A JPS57174458A (en) | 1981-04-22 | 1981-04-22 | Construction of vessel for evaporating source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5969281A JPS57174458A (en) | 1981-04-22 | 1981-04-22 | Construction of vessel for evaporating source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57174458A true JPS57174458A (en) | 1982-10-27 |
| JPS6215632B2 JPS6215632B2 (cs) | 1987-04-08 |
Family
ID=13120513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5969281A Granted JPS57174458A (en) | 1981-04-22 | 1981-04-22 | Construction of vessel for evaporating source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57174458A (cs) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6021379A (ja) * | 1983-07-18 | 1985-02-02 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| JPS6389651A (ja) * | 1986-10-03 | 1988-04-20 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| JPS63135963U (cs) * | 1987-02-23 | 1988-09-07 |
-
1981
- 1981-04-22 JP JP5969281A patent/JPS57174458A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6021379A (ja) * | 1983-07-18 | 1985-02-02 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| JPS6389651A (ja) * | 1986-10-03 | 1988-04-20 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| JPS63135963U (cs) * | 1987-02-23 | 1988-09-07 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6215632B2 (cs) | 1987-04-08 |
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