JPS57173804A - Substrate for optical circuit - Google Patents
Substrate for optical circuitInfo
- Publication number
- JPS57173804A JPS57173804A JP6020881A JP6020881A JPS57173804A JP S57173804 A JPS57173804 A JP S57173804A JP 6020881 A JP6020881 A JP 6020881A JP 6020881 A JP6020881 A JP 6020881A JP S57173804 A JPS57173804 A JP S57173804A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- substrate
- medium layer
- layer
- propagation medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
PURPOSE:To form an excellent optical waveguide by which an optical device such as an optical IC, etc. can be integrated and made small-sized easily, by forming a buffer layer whose refractive index is smaller than an optical propagation medium layer and forming the optical propagation medium layer on said buffer layer, in a substrate whose surface has been covered with the optical propagation medium layer. CONSTITUTION:In a substrate for an optical circuit, on a substrate 32 such as a GaAs single crystal substrate or a substrate of MgO, SrTiO3, spinel, etc., a buffer layer 33 is formed by quartz glass, silica glass, borosilicate glass, etc., on which an optical propagation medium layer 31 is formed by one or more kinds of ZnO, ZnS, ZnSe, CdS, CdSe, CdO, CdTe, BaTiO3, PbTiO3 and PLZT compounts, a refractive index of the buffer layer 33 is made smaller than that of the medium layer 31, and also the layer 33 is constituted so as to be in a matching state with a crystal lattice of the contact surface with the substrate 32. In this way, an optical propagation loss of the optical waveguide 31 is reduced and the integration is executed easily so that an optical device can be made small-sized, and an optical IC can be integrated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6020881A JPS57173804A (en) | 1981-04-20 | 1981-04-20 | Substrate for optical circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6020881A JPS57173804A (en) | 1981-04-20 | 1981-04-20 | Substrate for optical circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57173804A true JPS57173804A (en) | 1982-10-26 |
Family
ID=13135492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6020881A Pending JPS57173804A (en) | 1981-04-20 | 1981-04-20 | Substrate for optical circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57173804A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0281989A1 (en) * | 1987-03-11 | 1988-09-14 | Honeywell Inc. | Channel waveguide Schottky photodiode |
US4793697A (en) * | 1986-08-04 | 1988-12-27 | Motorola, Inc. | PLZT shutter with minimized space charge degradation |
US5613995A (en) * | 1993-04-23 | 1997-03-25 | Lucent Technologies Inc. | Method for making planar optical waveguides |
US6355945B1 (en) | 1998-07-06 | 2002-03-12 | Murata Manufacturing Co., Ltd. | Semiconductor optical device and optoelectronic integrated circuit device including a ZnO buffer layer |
EP2110694A1 (en) * | 2008-04-18 | 2009-10-21 | Sony DADC Austria AG | Method for manufacturing an optical waveguide, optical waveguide, and sensor arrangement |
-
1981
- 1981-04-20 JP JP6020881A patent/JPS57173804A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4793697A (en) * | 1986-08-04 | 1988-12-27 | Motorola, Inc. | PLZT shutter with minimized space charge degradation |
EP0281989A1 (en) * | 1987-03-11 | 1988-09-14 | Honeywell Inc. | Channel waveguide Schottky photodiode |
US5613995A (en) * | 1993-04-23 | 1997-03-25 | Lucent Technologies Inc. | Method for making planar optical waveguides |
US6355945B1 (en) | 1998-07-06 | 2002-03-12 | Murata Manufacturing Co., Ltd. | Semiconductor optical device and optoelectronic integrated circuit device including a ZnO buffer layer |
DE19931149B4 (en) * | 1998-07-06 | 2005-09-15 | Murata Mfg. Co., Ltd., Nagaokakyo | Optoelectronic integrated switching device |
EP2110694A1 (en) * | 2008-04-18 | 2009-10-21 | Sony DADC Austria AG | Method for manufacturing an optical waveguide, optical waveguide, and sensor arrangement |
US8811790B2 (en) | 2008-04-18 | 2014-08-19 | Sony Dadc Austria Ag | Method for manufacturing an optical waveguide, optical waveguide, and sensor arrangement |
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