JPS57173804A - Substrate for optical circuit - Google Patents

Substrate for optical circuit

Info

Publication number
JPS57173804A
JPS57173804A JP6020881A JP6020881A JPS57173804A JP S57173804 A JPS57173804 A JP S57173804A JP 6020881 A JP6020881 A JP 6020881A JP 6020881 A JP6020881 A JP 6020881A JP S57173804 A JPS57173804 A JP S57173804A
Authority
JP
Japan
Prior art keywords
optical
substrate
medium layer
layer
propagation medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6020881A
Other languages
Japanese (ja)
Inventor
Kiyotaka Wasa
Takao Kawaguchi
Kenzo Ochi
Tsuneo Mitsuyu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6020881A priority Critical patent/JPS57173804A/en
Publication of JPS57173804A publication Critical patent/JPS57173804A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/132Integrated optical circuits characterised by the manufacturing method by deposition of thin films

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To form an excellent optical waveguide by which an optical device such as an optical IC, etc. can be integrated and made small-sized easily, by forming a buffer layer whose refractive index is smaller than an optical propagation medium layer and forming the optical propagation medium layer on said buffer layer, in a substrate whose surface has been covered with the optical propagation medium layer. CONSTITUTION:In a substrate for an optical circuit, on a substrate 32 such as a GaAs single crystal substrate or a substrate of MgO, SrTiO3, spinel, etc., a buffer layer 33 is formed by quartz glass, silica glass, borosilicate glass, etc., on which an optical propagation medium layer 31 is formed by one or more kinds of ZnO, ZnS, ZnSe, CdS, CdSe, CdO, CdTe, BaTiO3, PbTiO3 and PLZT compounts, a refractive index of the buffer layer 33 is made smaller than that of the medium layer 31, and also the layer 33 is constituted so as to be in a matching state with a crystal lattice of the contact surface with the substrate 32. In this way, an optical propagation loss of the optical waveguide 31 is reduced and the integration is executed easily so that an optical device can be made small-sized, and an optical IC can be integrated.
JP6020881A 1981-04-20 1981-04-20 Substrate for optical circuit Pending JPS57173804A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6020881A JPS57173804A (en) 1981-04-20 1981-04-20 Substrate for optical circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6020881A JPS57173804A (en) 1981-04-20 1981-04-20 Substrate for optical circuit

Publications (1)

Publication Number Publication Date
JPS57173804A true JPS57173804A (en) 1982-10-26

Family

ID=13135492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6020881A Pending JPS57173804A (en) 1981-04-20 1981-04-20 Substrate for optical circuit

Country Status (1)

Country Link
JP (1) JPS57173804A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0281989A1 (en) * 1987-03-11 1988-09-14 Honeywell Inc. Channel waveguide Schottky photodiode
US4793697A (en) * 1986-08-04 1988-12-27 Motorola, Inc. PLZT shutter with minimized space charge degradation
US5613995A (en) * 1993-04-23 1997-03-25 Lucent Technologies Inc. Method for making planar optical waveguides
US6355945B1 (en) 1998-07-06 2002-03-12 Murata Manufacturing Co., Ltd. Semiconductor optical device and optoelectronic integrated circuit device including a ZnO buffer layer
EP2110694A1 (en) * 2008-04-18 2009-10-21 Sony DADC Austria AG Method for manufacturing an optical waveguide, optical waveguide, and sensor arrangement

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4793697A (en) * 1986-08-04 1988-12-27 Motorola, Inc. PLZT shutter with minimized space charge degradation
EP0281989A1 (en) * 1987-03-11 1988-09-14 Honeywell Inc. Channel waveguide Schottky photodiode
US5613995A (en) * 1993-04-23 1997-03-25 Lucent Technologies Inc. Method for making planar optical waveguides
US6355945B1 (en) 1998-07-06 2002-03-12 Murata Manufacturing Co., Ltd. Semiconductor optical device and optoelectronic integrated circuit device including a ZnO buffer layer
DE19931149B4 (en) * 1998-07-06 2005-09-15 Murata Mfg. Co., Ltd., Nagaokakyo Optoelectronic integrated switching device
EP2110694A1 (en) * 2008-04-18 2009-10-21 Sony DADC Austria AG Method for manufacturing an optical waveguide, optical waveguide, and sensor arrangement
US8811790B2 (en) 2008-04-18 2014-08-19 Sony Dadc Austria Ag Method for manufacturing an optical waveguide, optical waveguide, and sensor arrangement

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