JPS57168861A - Polishing method and its device - Google Patents

Polishing method and its device

Info

Publication number
JPS57168861A
JPS57168861A JP4938781A JP4938781A JPS57168861A JP S57168861 A JPS57168861 A JP S57168861A JP 4938781 A JP4938781 A JP 4938781A JP 4938781 A JP4938781 A JP 4938781A JP S57168861 A JPS57168861 A JP S57168861A
Authority
JP
Japan
Prior art keywords
work
polishing
area
pressure
ram11
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4938781A
Other languages
Japanese (ja)
Inventor
Motomi Katano
Satoru Ogawa
Shinichi Okada
Toru Okada
Original Assignee
Canon Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Electronics Inc filed Critical Canon Electronics Inc
Priority to JP4938781A priority Critical patent/JPS57168861A/en
Publication of JPS57168861A publication Critical patent/JPS57168861A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Abstract

PURPOSE:To polish a work in correctness further with a fine finish, by comparing polished area of the work, adapted to a polishing surface, with preset area and changing polishing pressure in accordance with a change of said polished area. CONSTITUTION:A work 2 is moved through handles 4, 6 while pressing its side A to a pressure detector surface B, arranged with plural pressure sensors 1b of a pressure detector device 1a in a matrix state, and approximate area information relating to a position of the work is programmed through an encoder and stored to a RAM11. To approximately obtain contact area, a scanning circuit 10 is operated under control of a CPU13, and its output in a line direction is obtained through an amplifier 1c and comparator 1d and measured. Then at polishing, polishing pressure is changed on the basis of area information stored in said RAM11.
JP4938781A 1981-04-03 1981-04-03 Polishing method and its device Pending JPS57168861A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4938781A JPS57168861A (en) 1981-04-03 1981-04-03 Polishing method and its device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4938781A JPS57168861A (en) 1981-04-03 1981-04-03 Polishing method and its device

Publications (1)

Publication Number Publication Date
JPS57168861A true JPS57168861A (en) 1982-10-18

Family

ID=12829605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4938781A Pending JPS57168861A (en) 1981-04-03 1981-04-03 Polishing method and its device

Country Status (1)

Country Link
JP (1) JPS57168861A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62241664A (en) * 1986-03-14 1987-10-22 Tennant Co Tool-force automatic compensator for surface maintenance working machine
US6270392B1 (en) 1998-06-19 2001-08-07 Nec Corporation Polishing apparatus and method with constant polishing pressure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62241664A (en) * 1986-03-14 1987-10-22 Tennant Co Tool-force automatic compensator for surface maintenance working machine
US6270392B1 (en) 1998-06-19 2001-08-07 Nec Corporation Polishing apparatus and method with constant polishing pressure

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