JPS57168248A - Formation of image with nonsilver photoresist composition - Google Patents
Formation of image with nonsilver photoresist compositionInfo
- Publication number
- JPS57168248A JPS57168248A JP5335981A JP5335981A JPS57168248A JP S57168248 A JPS57168248 A JP S57168248A JP 5335981 A JP5335981 A JP 5335981A JP 5335981 A JP5335981 A JP 5335981A JP S57168248 A JPS57168248 A JP S57168248A
- Authority
- JP
- Japan
- Prior art keywords
- image
- photoresist composition
- layer
- water
- soln
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/016—Diazonium salts or compounds
- G03F7/021—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders
- G03F7/0212—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders characterised by the polymeric binder or the macromolecular additives other than the diazo resins or the polymeric diazonium compounds
Abstract
PURPOSE:To obtain a negative image developable with water and having high optical density and resolving power by using a photoresist composition contg. water soluble diazo resin. CONSTITUTION:A photoresist composition prepared by adding 2-10wt% water soluble diazo resin to a copolymer consisting of 20-90mol% diacetone acrylamide and 10-80mol% acrylamide is applied to a support of glass or plastic film. An original brought into contact with the photoresist layer and exposed to ultraviolet light, and the unexposed non-image part of the layer is removed by dissolution in water to conduct development. The layer is then dyed with a water soluble dye soln., the dye at the non-image part is removed with water and a washing soln., and the layer is finished by treatment with a hardening mordant soln. Thus, a black relief image with 2.3-4.0 optical density is obtd. Since no photoresist composition is left and the unexposed part, the image is not discolored and has superior dimensional stability.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5335981A JPS57168248A (en) | 1981-04-09 | 1981-04-09 | Formation of image with nonsilver photoresist composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5335981A JPS57168248A (en) | 1981-04-09 | 1981-04-09 | Formation of image with nonsilver photoresist composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57168248A true JPS57168248A (en) | 1982-10-16 |
JPH0115858B2 JPH0115858B2 (en) | 1989-03-20 |
Family
ID=12940602
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5335981A Granted JPS57168248A (en) | 1981-04-09 | 1981-04-09 | Formation of image with nonsilver photoresist composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57168248A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6413540A (en) * | 1987-07-08 | 1989-01-18 | Hitachi Ltd | Photosensitive composition and pattern forming method using same |
JPH01282504A (en) * | 1988-05-10 | 1989-11-14 | Tokyo Ohka Kogyo Co Ltd | Formation of color filter |
JPH0289631A (en) * | 1988-09-27 | 1990-03-29 | Somar Corp | Chemical mat film and photosensitive film used therewith |
JP2003041159A (en) * | 2001-07-25 | 2003-02-13 | Toppan Forms Co Ltd | Epoxy-based insulating ink for ic media |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4968801A (en) * | 1972-11-06 | 1974-07-03 |
-
1981
- 1981-04-09 JP JP5335981A patent/JPS57168248A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4968801A (en) * | 1972-11-06 | 1974-07-03 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6413540A (en) * | 1987-07-08 | 1989-01-18 | Hitachi Ltd | Photosensitive composition and pattern forming method using same |
JPH01282504A (en) * | 1988-05-10 | 1989-11-14 | Tokyo Ohka Kogyo Co Ltd | Formation of color filter |
JPH0789163B2 (en) * | 1988-05-10 | 1995-09-27 | 東京応化工業株式会社 | How to create a color filter |
JPH0289631A (en) * | 1988-09-27 | 1990-03-29 | Somar Corp | Chemical mat film and photosensitive film used therewith |
JPH0524172B2 (en) * | 1988-09-27 | 1993-04-07 | Somar Corp | |
JP2003041159A (en) * | 2001-07-25 | 2003-02-13 | Toppan Forms Co Ltd | Epoxy-based insulating ink for ic media |
Also Published As
Publication number | Publication date |
---|---|
JPH0115858B2 (en) | 1989-03-20 |
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