JPS57163236A - Peeling solution for use in photocured film - Google Patents

Peeling solution for use in photocured film

Info

Publication number
JPS57163236A
JPS57163236A JP4888981A JP4888981A JPS57163236A JP S57163236 A JPS57163236 A JP S57163236A JP 4888981 A JP4888981 A JP 4888981A JP 4888981 A JP4888981 A JP 4888981A JP S57163236 A JPS57163236 A JP S57163236A
Authority
JP
Japan
Prior art keywords
peeling
10pts
alkali metal
metal hydroxide
monoethyl ether
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4888981A
Other languages
English (en)
Japanese (ja)
Other versions
JPH023982B2 (enrdf_load_stackoverflow
Inventor
Hajime Kakumaru
Noboru Sugasawa
Nobuyuki Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP4888981A priority Critical patent/JPS57163236A/ja
Publication of JPS57163236A publication Critical patent/JPS57163236A/ja
Publication of JPH023982B2 publication Critical patent/JPH023982B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Paints Or Removers (AREA)
  • ing And Chemical Polishing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP4888981A 1981-03-31 1981-03-31 Peeling solution for use in photocured film Granted JPS57163236A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4888981A JPS57163236A (en) 1981-03-31 1981-03-31 Peeling solution for use in photocured film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4888981A JPS57163236A (en) 1981-03-31 1981-03-31 Peeling solution for use in photocured film

Publications (2)

Publication Number Publication Date
JPS57163236A true JPS57163236A (en) 1982-10-07
JPH023982B2 JPH023982B2 (enrdf_load_stackoverflow) 1990-01-25

Family

ID=12815838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4888981A Granted JPS57163236A (en) 1981-03-31 1981-03-31 Peeling solution for use in photocured film

Country Status (1)

Country Link
JP (1) JPS57163236A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6131478A (ja) * 1984-07-24 1986-02-13 Mannen:Kk 塗膜剥離剤
JPS61162568A (ja) * 1985-01-10 1986-07-23 Mitsui Petrochem Ind Ltd 被膜の除去方法
JPS61163342A (ja) * 1985-01-14 1986-07-24 Ricoh Co Ltd フオトレジスト除去方法
JPH02131239A (ja) * 1988-11-11 1990-05-21 Nagase Denshi Kagaku Kk 水性剥離剤組成物

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6131478A (ja) * 1984-07-24 1986-02-13 Mannen:Kk 塗膜剥離剤
JPS61162568A (ja) * 1985-01-10 1986-07-23 Mitsui Petrochem Ind Ltd 被膜の除去方法
JPS61163342A (ja) * 1985-01-14 1986-07-24 Ricoh Co Ltd フオトレジスト除去方法
JPH02131239A (ja) * 1988-11-11 1990-05-21 Nagase Denshi Kagaku Kk 水性剥離剤組成物

Also Published As

Publication number Publication date
JPH023982B2 (enrdf_load_stackoverflow) 1990-01-25

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