JPS57162666A - Liquid dropping device - Google Patents

Liquid dropping device

Info

Publication number
JPS57162666A
JPS57162666A JP4752581A JP4752581A JPS57162666A JP S57162666 A JPS57162666 A JP S57162666A JP 4752581 A JP4752581 A JP 4752581A JP 4752581 A JP4752581 A JP 4752581A JP S57162666 A JPS57162666 A JP S57162666A
Authority
JP
Japan
Prior art keywords
nozzle
solvent
cover
leading end
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4752581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0117748B2 (enExample
Inventor
Muneo Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKYO DENSHI KAGAKU KABUSHIKI
Tokyo Denshi Kagaku KK
Original Assignee
TOKYO DENSHI KAGAKU KABUSHIKI
Tokyo Denshi Kagaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKYO DENSHI KAGAKU KABUSHIKI, Tokyo Denshi Kagaku KK filed Critical TOKYO DENSHI KAGAKU KABUSHIKI
Priority to JP4752581A priority Critical patent/JPS57162666A/ja
Publication of JPS57162666A publication Critical patent/JPS57162666A/ja
Publication of JPH0117748B2 publication Critical patent/JPH0117748B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP4752581A 1981-03-30 1981-03-30 Liquid dropping device Granted JPS57162666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4752581A JPS57162666A (en) 1981-03-30 1981-03-30 Liquid dropping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4752581A JPS57162666A (en) 1981-03-30 1981-03-30 Liquid dropping device

Publications (2)

Publication Number Publication Date
JPS57162666A true JPS57162666A (en) 1982-10-06
JPH0117748B2 JPH0117748B2 (enExample) 1989-03-31

Family

ID=12777531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4752581A Granted JPS57162666A (en) 1981-03-30 1981-03-30 Liquid dropping device

Country Status (1)

Country Link
JP (1) JPS57162666A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010186929A (ja) * 2009-02-13 2010-08-26 Tokyo Electron Ltd 基板処理装置及び基板処理方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081067A (enExample) * 1973-11-16 1975-07-01
JPS5165882A (en) * 1974-12-05 1976-06-07 Sony Corp Fuotorejisutono tofuhoho
JPS528383U (enExample) * 1975-07-02 1977-01-20

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081067A (enExample) * 1973-11-16 1975-07-01
JPS5165882A (en) * 1974-12-05 1976-06-07 Sony Corp Fuotorejisutono tofuhoho
JPS528383U (enExample) * 1975-07-02 1977-01-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010186929A (ja) * 2009-02-13 2010-08-26 Tokyo Electron Ltd 基板処理装置及び基板処理方法

Also Published As

Publication number Publication date
JPH0117748B2 (enExample) 1989-03-31

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