JPS57157453U - - Google Patents
Info
- Publication number
- JPS57157453U JPS57157453U JP1981044623U JP4462381U JPS57157453U JP S57157453 U JPS57157453 U JP S57157453U JP 1981044623 U JP1981044623 U JP 1981044623U JP 4462381 U JP4462381 U JP 4462381U JP S57157453 U JPS57157453 U JP S57157453U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981044623U JPS5936367Y2 (ja) | 1981-03-31 | 1981-03-31 | 両面研摩装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981044623U JPS5936367Y2 (ja) | 1981-03-31 | 1981-03-31 | 両面研摩装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57157453U true JPS57157453U (OSRAM) | 1982-10-02 |
| JPS5936367Y2 JPS5936367Y2 (ja) | 1984-10-06 |
Family
ID=29841545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981044623U Expired JPS5936367Y2 (ja) | 1981-03-31 | 1981-03-31 | 両面研摩装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5936367Y2 (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010021086A1 (ja) * | 2008-08-20 | 2010-02-25 | 信越半導体株式会社 | 両面研磨装置用キャリア及びこれを用いた両面研磨装置並びに両面研磨方法 |
| JP2010120112A (ja) * | 2008-11-19 | 2010-06-03 | Shin Etsu Handotai Co Ltd | 両面研磨装置用キャリア及びこれを用いた両面研磨装置並びに両面研磨方法 |
-
1981
- 1981-03-31 JP JP1981044623U patent/JPS5936367Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010021086A1 (ja) * | 2008-08-20 | 2010-02-25 | 信越半導体株式会社 | 両面研磨装置用キャリア及びこれを用いた両面研磨装置並びに両面研磨方法 |
| JP2010050193A (ja) * | 2008-08-20 | 2010-03-04 | Shin Etsu Handotai Co Ltd | 両面研磨装置用キャリア及びこれを用いた両面研磨装置並びに両面研磨方法 |
| JP2010120112A (ja) * | 2008-11-19 | 2010-06-03 | Shin Etsu Handotai Co Ltd | 両面研磨装置用キャリア及びこれを用いた両面研磨装置並びに両面研磨方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5936367Y2 (ja) | 1984-10-06 |