JPS57157145A - X-ray analyzer - Google Patents
X-ray analyzerInfo
- Publication number
- JPS57157145A JPS57157145A JP56043738A JP4373881A JPS57157145A JP S57157145 A JPS57157145 A JP S57157145A JP 56043738 A JP56043738 A JP 56043738A JP 4373881 A JP4373881 A JP 4373881A JP S57157145 A JPS57157145 A JP S57157145A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- detector
- diffraction
- generator
- alpha1
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
Abstract
PURPOSE:To enable to perform a selective fluorescent X-ray analysis and X-ray diffraction by an on-line, by a method wherein a device is constituted such that an X-ray irradiating direction of an X-ray generator and an X-ray detecting direction of an X-ray detector can be easily changed. CONSTITUTION:After an X-ray generator 1 and an X-ray detector 2 are placed on base seats 11 and 21 so that the X-ray irradiating direction and X-ray detecting direction, respectively, point a measuring point S, a position is set so that an X-ray incident angle alpha2 and an X-ray radiating angle beta2 are set to 60-90 deg. through operation of handles 19 and 29, and a detector 2 detects a fluorescent X-ray strength generated from a film layer PM. In case an alloy at the film layer PM is identified, the position of the X-ray generator 1 is set so that the X-ray incident angle alpha1 is brought into 8-20 deg., and a position of an X-ray detector 2 is set so that an X-ray diffraction angle beta1 becomes equal to alpha1 to detect a diffraction X-ray by means of the detector 2. This permits to perform a flourescnet X-ray analysis and an X-ray diffraction against an object to be measured in a short period of time.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56043738A JPS57157145A (en) | 1981-03-24 | 1981-03-24 | X-ray analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56043738A JPS57157145A (en) | 1981-03-24 | 1981-03-24 | X-ray analyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57157145A true JPS57157145A (en) | 1982-09-28 |
Family
ID=12672114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56043738A Pending JPS57157145A (en) | 1981-03-24 | 1981-03-24 | X-ray analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57157145A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0108447A2 (en) * | 1982-11-04 | 1984-05-16 | North American Philips Corporation | Simultaneous collection of diffraction and spectrographic data |
WO1986002164A1 (en) * | 1984-10-05 | 1986-04-10 | Kawasaki Steel Corporation | Method of determining thickness and composition of alloy film |
-
1981
- 1981-03-24 JP JP56043738A patent/JPS57157145A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0108447A2 (en) * | 1982-11-04 | 1984-05-16 | North American Philips Corporation | Simultaneous collection of diffraction and spectrographic data |
WO1986002164A1 (en) * | 1984-10-05 | 1986-04-10 | Kawasaki Steel Corporation | Method of determining thickness and composition of alloy film |
US4764945A (en) * | 1984-10-05 | 1988-08-16 | Kawasaki Steel Corp. | Method of measuring layer thickness and composition of alloy plating |
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