JPS57156570A - Measuring device - Google Patents

Measuring device

Info

Publication number
JPS57156570A
JPS57156570A JP4029181A JP4029181A JPS57156570A JP S57156570 A JPS57156570 A JP S57156570A JP 4029181 A JP4029181 A JP 4029181A JP 4029181 A JP4029181 A JP 4029181A JP S57156570 A JPS57156570 A JP S57156570A
Authority
JP
Japan
Prior art keywords
end signal
signal
tester
measuring device
prober
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4029181A
Other languages
Japanese (ja)
Inventor
Yoshiaki Chori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4029181A priority Critical patent/JPS57156570A/en
Publication of JPS57156570A publication Critical patent/JPS57156570A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/02Measuring characteristics of individual pulses, e.g. deviation from pulse flatness, rise time or duration
    • G01R29/027Indicating that a pulse characteristic is either above or below a predetermined value or within or beyond a predetermined range of values

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE:To improve the activity of a measuring device by letting an operator know the halt state of the measuring device due to a failure in end signal origination by a tester through an end signal delay detecting mechanism and a warning mechanism. CONSTITUTION:An end signal delay detecting mechanism 3 receives an end signal from a tester 2 and a start signal from a prober 1. A time from the reception of the start signal to that of the end signal is nearly constant because the tester 2 operates automatically. For this purpose, setting delay time allows the end signal delay detecting mechanism 3 to transfer the end signal to the prober 1 when receiving the end signal within the set delay time, but to operate a warning mechanism 4 when not. The warning mechanism 4 when receiving the alarm signal from the mechanism 3 starts an alarm.
JP4029181A 1981-03-23 1981-03-23 Measuring device Pending JPS57156570A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4029181A JPS57156570A (en) 1981-03-23 1981-03-23 Measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4029181A JPS57156570A (en) 1981-03-23 1981-03-23 Measuring device

Publications (1)

Publication Number Publication Date
JPS57156570A true JPS57156570A (en) 1982-09-27

Family

ID=12576494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4029181A Pending JPS57156570A (en) 1981-03-23 1981-03-23 Measuring device

Country Status (1)

Country Link
JP (1) JPS57156570A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63234539A (en) * 1987-03-24 1988-09-29 Tokyo Electron Ltd Probe device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63234539A (en) * 1987-03-24 1988-09-29 Tokyo Electron Ltd Probe device

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