JPS57154242A - Photomask and manufacture thereof - Google Patents
Photomask and manufacture thereofInfo
- Publication number
- JPS57154242A JPS57154242A JP54082A JP54082A JPS57154242A JP S57154242 A JPS57154242 A JP S57154242A JP 54082 A JP54082 A JP 54082A JP 54082 A JP54082 A JP 54082A JP S57154242 A JPS57154242 A JP S57154242A
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US22245181A | 1981-01-05 | 1981-01-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57154242A true JPS57154242A (en) | 1982-09-24 |
| JPH0213780B2 JPH0213780B2 (cs) | 1990-04-05 |
Family
ID=22832261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54082A Granted JPS57154242A (en) | 1981-01-05 | 1982-01-05 | Photomask and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57154242A (cs) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5179575A (cs) * | 1975-01-06 | 1976-07-10 | Hitachi Ltd | |
| JPS55121442A (en) * | 1979-03-14 | 1980-09-18 | Mitsubishi Electric Corp | Photomask base plate |
| JPS55121443A (en) * | 1979-03-14 | 1980-09-18 | Mitsubishi Electric Corp | Photomask base plate |
| JPS5687043A (en) * | 1979-12-19 | 1981-07-15 | Hitachi Ltd | Mask for exposure |
| JPS56130749A (en) * | 1980-03-18 | 1981-10-13 | Nec Corp | Photomask for projective exposure |
-
1982
- 1982-01-05 JP JP54082A patent/JPS57154242A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5179575A (cs) * | 1975-01-06 | 1976-07-10 | Hitachi Ltd | |
| JPS55121442A (en) * | 1979-03-14 | 1980-09-18 | Mitsubishi Electric Corp | Photomask base plate |
| JPS55121443A (en) * | 1979-03-14 | 1980-09-18 | Mitsubishi Electric Corp | Photomask base plate |
| JPS5687043A (en) * | 1979-12-19 | 1981-07-15 | Hitachi Ltd | Mask for exposure |
| JPS56130749A (en) * | 1980-03-18 | 1981-10-13 | Nec Corp | Photomask for projective exposure |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0213780B2 (cs) | 1990-04-05 |
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