JPS5715419A - Supporting draining board made of quartz glass - Google Patents

Supporting draining board made of quartz glass

Info

Publication number
JPS5715419A
JPS5715419A JP2324481A JP2324481A JPS5715419A JP S5715419 A JPS5715419 A JP S5715419A JP 2324481 A JP2324481 A JP 2324481A JP 2324481 A JP2324481 A JP 2324481A JP S5715419 A JPS5715419 A JP S5715419A
Authority
JP
Japan
Prior art keywords
quartz glass
board made
draining board
supporting draining
supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2324481A
Other languages
English (en)
Inventor
Aruberuto Shiyuruke Karuru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Schott Quarzschmelze GmbH
Original Assignee
Heraeus Schott Quarzschmelze GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Schott Quarzschmelze GmbH filed Critical Heraeus Schott Quarzschmelze GmbH
Publication of JPS5715419A publication Critical patent/JPS5715419A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
JP2324481A 1980-06-30 1981-02-20 Supporting draining board made of quartz glass Pending JPS5715419A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3024751A DE3024751C2 (de) 1980-06-30 1980-06-30 Trägerhorde aus Quarzglas

Publications (1)

Publication Number Publication Date
JPS5715419A true JPS5715419A (en) 1982-01-26

Family

ID=6106048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2324481A Pending JPS5715419A (en) 1980-06-30 1981-02-20 Supporting draining board made of quartz glass

Country Status (4)

Country Link
US (1) US4477112A (ja)
JP (1) JPS5715419A (ja)
DE (1) DE3024751C2 (ja)
GB (1) GB2080618B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62157147U (ja) * 1986-03-27 1987-10-06

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3419866C2 (de) * 1984-05-28 1986-06-26 Heraeus Quarzschmelze Gmbh, 6450 Hanau Trägerhorde aus Quarzglas für scheibenförmige Substrate
DE3440111C1 (de) * 1984-11-02 1986-05-15 Heraeus Quarzschmelze Gmbh, 6450 Hanau Traegerhorde
DE3612375A1 (de) * 1986-04-12 1987-10-15 Heraeus Schott Quarzschmelze Beladevorrichtung zur aufnahme von in einem ofen zu behandelnde substratscheiben
EP0267462A3 (en) * 1986-11-12 1990-01-31 Heraeus Amersil, Inc. Mass transferable semiconductor substrate processing and handling full shell carrier (boat)
US5674227A (en) * 1996-05-08 1997-10-07 Burns; Margaret K. Afterbirth retaining device
US8759084B2 (en) * 2010-01-22 2014-06-24 Michael J. Nichols Self-sterilizing automated incubator
CN102275234B (zh) * 2011-06-29 2014-03-12 沈利军 单晶/多晶硅片多线切割自动脱胶方法及其装置
US8915526B1 (en) * 2013-03-07 2014-12-23 William T. Ott Grill accessory

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4195871A (en) * 1978-06-12 1980-04-01 Codi Corporation Diffusion boat and grip

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62157147U (ja) * 1986-03-27 1987-10-06

Also Published As

Publication number Publication date
GB2080618A (en) 1982-02-03
GB2080618B (en) 1984-06-06
DE3024751A1 (de) 1982-03-18
US4477112A (en) 1984-10-16
DE3024751C2 (de) 1982-06-03

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